Deposition Mask Membrane Structure for Pixel Gap Stability
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Solution Overview
Problem
The deformation of deposition masks during manufacturing leads to inaccuracies in pixel position alignment (PPA) due to changes in the gap between pixel openings, which is critical for high-resolution displays like AR glasses requiring 3000 PPI or higher.
Innovation Solution
Incorporating a heterogeneous material pattern with a higher thermal expansion coefficient than the membrane and grooves perpendicular to the gaps between pixel openings, along with spacers, to stabilize the membrane and maintain accurate pixel alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a membrane with pixel openings is formed on a substrate during deposition mask manufacturing, then the mask structure is created, but the membrane deforms causing gap changes between pixel openings and degradation of pixel position accuracy
Solution Approach 1:
The patent introduces heterogeneous material patterns with different thermal expansion coefficients than the membrane material. These patterns are strategically placed on the membrane to compensate for thermal deformation during deposition processes, maintaining stable gap dimensions between pixel openings despite temperature variations.
Solution Approach 2:
The patent creates a composite membrane structure by integrating heterogeneous material patterns into the membrane. This composite structure combines materials with different thermal expansion properties to counteract deformation, ensuring the membrane maintains its geometric integrity and pixel positioning accuracy during high-temperature deposition manufacturing.
2Manufacturing precision
If the membrane is made thinner to achieve higher resolution, then pixel density increases, but the membrane becomes more susceptible to deformation and manufacturing defects
Solution Approach 1:
The patent employs heterogeneous material patterns that undergo controlled thermal expansion or contraction to compensate for the inherent fragility of thin membranes. These patterns act as built-in compensation mechanisms that maintain dimensional stability even when the membrane thickness is reduced to achieve higher pixel density.
Solution Approach 2:
The patent pre-compensates for potential membrane deformation by incorporating heterogeneous material patterns before the deposition process. These patterns are designed to counteract expected thermal and mechanical stresses, preventing deformation rather than correcting it after occurrence, thereby maintaining reliability in ultra-thin high-resolution membranes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures uniformity in the gap between pixel openings, improving pixel position accuracy (PPA) and maintaining the required resolution for high-resolution displays.
Implementation Method 1
At least one heterogeneous material pattern made of a material different from the membrane and having a higher coefficient of thermal expansion than the membrane is disposed on the rib region
Data Source
AI summary
A deposition mask includes a mask frame having a cell opening, and a membrane disposed on the mask frame and having a plurality of pixel openings connected to the cell opening. The membrane includes a rib region defining the pixel openings. At least one heterogeneous material pattern made of a material different from the membrane is disposed on the rib region or at least one groove is formed in the rib region.