Deposition Mask Structure to Minimize Shadow Areas
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Solution Overview
Problem
Existing masks used in display panel manufacturing lack precision in shaping functional layers, leading to suboptimal deposition quality of patterned layers.
Innovation Solution
A mask with a mask sheet featuring protrusions and recesses adjacent to openings, made of an alloy of iron and nickel, is designed to enhance precision and deposition quality by minimizing shadow areas and maintaining thermal stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional mask design is used, then manufacturing simplicity is maintained, but deposition precision and quality deteriorate due to lack of protrusions and recesses in opening regions
Solution Approach 1:
The patent applies local quality by adding protrusions and recesses only in specific regions adjacent to opening regions, rather than modifying the entire mask uniformly. This localized structural modification improves deposition precision at critical areas while maintaining relative simplicity in other regions, thus resolving the contradiction between manufacturing precision and device complexity.
2Manufacturing precision
If mask opening regions are used for deposition, then functional layers are formed, but shadow areas are generated that reduce deposition quality
Solution Approach 1:
The patent applies preliminary anti-action by pre-forming protrusions adjacent to opening regions that counteract the generation of shadow areas during deposition. These protrusions act as preliminary structural elements that prevent harmful shadow effects before deposition occurs, thereby improving deposition quality by eliminating the harmful shadow areas.
3Manufacturing precision
If laser processing is used to form protrusions and recesses, then manufacturing precision is improved, but processing time increases
Solution Approach 1:
The patent applies periodic action by using pulsed laser processing to form protrusions and recesses. Instead of continuous laser processing, the pulsed approach allows for periodic energy delivery that achieves precise structural formation while enabling cooling intervals, thus reducing overall processing time while maintaining high manufacturing precision.
4Manufacturing precision
If mask sheet is placed close to substrate for precise deposition, then deposition quality improves, but substrate damage risk increases
Solution Approach 1:
The patent applies the intermediary principle by introducing protrusions as mediating structures between the mask sheet and substrate. These protrusions serve as intermediate elements that allow the mask to be positioned close to the substrate for high deposition quality while physically preventing direct contact that would cause substrate damage, thus resolving the contradiction between deposition quality and substrate protection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mask improves the precision and quality of functional layer deposition on display panels by reducing shadow areas and maintaining substrate integrity during the deposition process.
Implementation Method 1
forming a mask sheet including a protrusion adjacent to the opening and protruding from the lower surface, and a recess adjacent to the protrusion and recessed from the lower surface toward the upper surface of the mask sheet
Implementation Method 2
formed using laser processing to achieve precise opening shapes and dimensions
Data Source
AI summary
A mask includes a mask sheet including an upper surface and a lower surface facing the upper surface, the mask sheet including an opening passing through the upper surface and the lower surface; and a mask frame that supports the mask sheet, the mask sheet includes a protrusion adjacent to the opening and protruding from the lower surface, and a recess adjacent to the protrusion and recessed from the lower surface toward the upper surface of the mask sheet.