Deposition Source Heat Transfer Member Uniformity
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Solution Overview
Problem
Vacuum deposition processes for forming organic layers in flat display devices face issues with non-uniform heat transfer and splash phenomena, leading to suboptimal deposition characteristics and limitations in forming desired thin films.
Innovation Solution
A deposition source with a crucible and a heat transfer member, such as a thermo ball, is used, where the heat transfer member is accommodated by a mesh plate-shaped accommodation member to ensure uniform heat distribution and prevent splash, using materials like titanium for supports to enhance durability and prevent heat transfer member escape.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional crucible is used for vacuum deposition, then the deposition process is simple, but heat transfer is non-uniform and splash phenomena occur
Solution Approach 1:
A heat transfer member (such as a heat transfer plate or heat transfer balls) is introduced as an intermediary between the heating source and the deposition material. This intermediary component facilitates uniform heat distribution to the deposition material, preventing localized overheating and splash phenomena while maintaining the simplicity of the vacuum deposition process.
Solution Approach 2:
The heat transfer member is designed with specific local properties (such as high thermal conductivity in certain regions or specific geometric features) to optimize heat distribution patterns. This allows different parts of the deposition material to receive appropriate heat quantities, ensuring uniform vaporization and deposition across the entire substrate area.
2Productivity
If deposition material is heated to form vapor, then deposition film is formed on substrate, but non-uniform vaporization and splash occur
Solution Approach 1:
The heat transfer member acts as a mediator that buffers and regulates the heating process. It absorbs heat from the heating source and distributes it uniformly to the deposition material, ensuring stable and controlled vaporization. This prevents sudden temperature spikes that cause splash phenomena and maintains consistent deposition characteristics throughout the process.
Solution Approach 2:
The heat transfer member is positioned in advance to cushion and moderate the heat transfer process before it reaches the deposition material. This pre-regulation of heat flow prevents extreme temperature conditions that would lead to unstable vaporization and deposition, ensuring reliable deposition characteristics from the start of the process.
3Temperature
If heat is applied to vaporize deposition material, then deposited film is formed, but heat is non-uniformly transferred
Solution Approach 1:
The heat transfer member serves as an intermediary thermal conduction element between the heating source and the deposition material. Its high thermal conductivity and geometric design enable it to distribute heat uniformly across its surface, ensuring that the deposition material receives consistent thermal energy and vaporizes uniformly, thereby achieving precise control over the deposited film formation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves improved uniformity in deposition processes, preventing splash and ensuring consistent film formation, thereby enhancing the deposition characteristics and quality of thin films in flat display devices.
Implementation Method 1
heat transfer member disposed on an upper portion of the deposition material filled in the crucible
Implementation Method 2
The crucible is heated so that gas particles may be moved towards a substrate and the deposition material is deposited on the substrate
Implementation Method 3
an accommodation member for accommodating the heat transfer member and including a mesh plate
Data Source
AI summary
A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition material in the crucible; and an accommodation member for accommodating the heat transfer member and including a mesh plate.