Depressed Cladding Waveguide for Low-Loss Electro-Optical Modulation

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Solution Overview

Problem

Existing electro-optical modulators face challenges in achieving low propagation loss and low control voltage for high-speed optical switching in the GHz frequency range.

Innovation Solution

A waveguide device with a substrate of electro-optical material, featuring a waveguide with a specific arrangement of tracks that form equilateral triangles, and electrodes to provide an electro-optical modulator with reduced propagation loss and control voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a planar waveguide is manufactured in a LiNbO3 film, then the waveguide structure is simple and manufacturable, but the propagation loss exceeds 3 dB/cm which is too high

Engineering Contradiction:
Improvewaveguide manufacturing simplicityVSAvoidpropagation loss
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent uses a composite waveguide structure combining LiNbO3 electro-optical material with deposited dielectric layers (SiO2, Si3N4, Ta2O5) to create a depressed cladding waveguide. This composite structure reduces propagation loss to below 0.5 dB/cm while maintaining manufacturability through standard thin-film deposition techniques.

Inventive Principle:
Principle #40Composite materials

2Length of moving object

If the optical path length is increased to several centimeters, then the control voltage can be reduced to 20 V or less, but the propagation loss increases significantly

Engineering Contradiction:
Improveoptical path lengthVSAvoidpropagation loss
Core Design Contradiction:
Length of moving objectVSLoss of energy

Solution Approach 1:

The patent changes the refractive index parameter by creating a depressed cladding structure where the cladding layer has a lower refractive index than the core. This parameter change enables strong optical confinement with a short interaction length (L < 1 cm), achieving both low control voltage (≤20 V) and low propagation loss (≤0.5 dB/cm) simultaneously.

Inventive Principle:
Principle #35Parameter changes

3Length of moving object

If the distance between electrodes is reduced, then the control voltage decreases below 20 V, but the manufacturing precision requirements increase

Engineering Contradiction:
Improveelectrode distanceVSAvoidelectrode positioning precision
Core Design Contradiction:
Length of moving objectVSManufacturing precision

Solution Approach 1:

The patent moves the electrode positioning problem from a lateral dimension to a vertical dimension by depositing dielectric layers on top of the LiNbO3 substrate. The electrode distance is controlled by thin-film deposition thickness rather than lateral lithography, reducing positioning precision requirements and enabling sub-20 V operation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Length of moving object

If a waveguide architecture is used to achieve short optical path and small electrode distance, then the control voltage and device dimensions are reduced, but the propagation loss must be kept below 0.5 dB/cm

Engineering Contradiction:
Improveoptical path lengthVSAvoidpropagation loss
Core Design Contradiction:
Length of moving objectVSLoss of energy

Solution Approach 1:

The patent applies local quality by creating a depressed cladding region with specific refractive index properties only where needed for optical confinement. The core maintains high refractive index for strong confinement, while the cladding has reduced refractive index to minimize loss, achieving propagation loss < 0.5 dB/cm with short interaction length.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves a propagation loss below 0.5 dB/cm and a control voltage of at most 20 V, enabling fast (>1 GHz) switching operations in an electro-optical modulator.

Implementation Method 1

The forming of each track of the plurality of tracks comprises focusing a laser beam into the electro-optical material to permanently reduce a refractive index in a focus of the laser beam from the first refractive index to a second refractive index smaller than the first refractive index

Methodology Applied
Scientific EffectLaser-induced refractive index change: Laser

Implementation Method 2

A low voltage, low insertion-loss electro-optical modulator (EOM) is a key element for high-speed optical switching

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Data Source

PatentUS12321052B2Waveguide for low loss, high speed electro-optical modulator
Publication Date: 2025.06.03 TERRA QUANTUM AG
  • US12321052B2 patent drawing
  • US12321052B2 patent drawing
  • US12321052B2 patent drawing

AI summary

A waveguide device comprises a substrate comprising an electro-optical material; a waveguide formed in the electro-optical material; and a plurality of electrodes formed in a vicinity of the waveguide. The electro-optical material has a first refractive index. The waveguide comprises a plurality of tracks. The tracks comprise a second refractive index smaller than the first refractive index, are parallel to each other with a common direction defining a direction of the waveguide, and form an arrangement in a plane perpendicular to the direction of the waveguide. The arrangement comprises at least 40 equilateral triangles of identical side lengths, wherein all three corners of each of the equilateral triangles each coincide with a different track of the plurality of tracks in the plane perpendicular to the direction of the waveguide.