Detachable Plasma Detection Window Segmentation
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Solution Overview
Problem
Conventional detection windows in plasma chambers have uneven surfaces, leading to poor optical transmittance, difficulty in cleaning, and high replacement costs due to corrosion, which can result in inaccurate end-point detection during semiconductor processes.
Innovation Solution
A detachable detection window with a base and cannular tube assembly, featuring linking-up parts with concave and convex shapes, allowing for easy assembly and disassembly, and potentially threaded grooves, enabling precise detection and reducing maintenance costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional integrally formed detection window is used, then the structure is simple and manufacturing is straightforward, but the bottom surface becomes uneven causing poor optical transmittance
Solution Approach 1:
The detection window is divided into multiple separate components (base, cover, and intermediate structure) that can be assembled together. This segmentation allows each component to be manufactured with precise flat surfaces while avoiding the uneven bottom surface problem of integrally formed windows, thereby improving optical transmittance without requiring complete redesign of the entire structure.
2Ease of operation
If a conventional integrally formed detection window is used, then the structure is robust, but cleaning becomes difficult and chemical traces contamination occurs
Solution Approach 1:
By dividing the detection window into separable components (base, cover, and intermediate structure), the system enables easy access to all surfaces for cleaning. The detachable design allows complete disassembly for thorough cleaning without chemical solutions, eliminating chemical traces contamination and improving process reliability while maintaining structural robustness through the modular assembly.
3Ease of manufacture
If a conventional detection window is used, then the structure is simple, but replacement cost increases significantly after corrosion damage
Solution Approach 1:
The detection window is designed as a modular assembly of base, cover, and intermediate structure components connected by linking parts. When corrosion damage occurs, only the affected component needs to be replaced rather than the entire window assembly. The standardized linking-up parts with concave and convex shapes enable quick reassembly, reducing replacement costs while maintaining manageable assembly complexity.
4Ease of operation
If chemical solution is used to clean the detection window, then cleaning effectiveness improves, but corrosion and chemical traces contamination worsen
Solution Approach 1:
The detachable design allows complete disassembly of the detection window into base, cover, and intermediate structure components. This enables thorough manual cleaning of all surfaces including hard-to-reach areas without requiring chemical solutions. The segmented structure maintains cleaning effectiveness while eliminating corrosion and chemical traces contamination by allowing complete physical access to all surfaces.
Data Source
AI summary
A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a first linking-up part and a second linking-up part is formed at an end of the cannular tube. The base and the cannular tube are assembled to form the detachable detection window.