Physical Quantity Detection Element Mass Distribution
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Solution Overview
Problem
Existing physical quantity detection elements, such as those based on a locker lever principle, face challenges in miniaturization due to damage from impacts and reduced sensitivity caused by uneven mass distribution and narrow gaps near penetration holes, leading to decreased reliability and sensitivity in detecting vertical acceleration.
Innovation Solution
A physical quantity detection element design with a movable body having a first movable body with greater mass than a second movable body, and a first mass portion with greater mass than its corresponding movable electrode portion, along with strategically placed penetration holes and buffer portions, enhances sensitivity and reliability by increasing torque and rigidity, while maintaining miniaturization capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If penetration holes are provided on the movable body to prevent drag, then air resistance is reduced, but the movable body becomes susceptible to impact damage
Solution Approach 1:
The patent applies local quality by creating different gap widths at different locations on the movable body. The gap width is made larger near the penetration holes and smaller away from them, which locally strengthens the movable body at critical areas while maintaining the overall function of reducing air resistance through the penetration holes.
2Volume of moving object
If the gap width near penetration holes is made narrow to reduce size, then miniaturization is achieved, but the movable body is easily damaged by impact
Solution Approach 1:
The patent implements local quality by varying the gap width across different regions of the movable body. Specifically, the gap width is designed to be larger near the penetration holes and smaller in other regions, which allows miniaturization in certain areas while providing impact resistance in critical areas near the penetration holes.
3Measurement precision
If mass of the movable body is increased to improve sensitivity, then detection sensitivity improves, but device size increases
Solution Approach 1:
The patent applies parameter changes by optimizing the gap width parameter across different regions of the movable body. By making the gap width larger near penetration holes and smaller elsewhere, the design achieves both miniaturization and maintained detection sensitivity through careful parameter optimization rather than uniform mass increase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design improves sensitivity and reliability for detecting physical quantities by increasing torque and rigidity, preventing damage to the mass portion and allowing for effective miniaturization of the detection element.
Implementation Method 1
the mass of the first mass portion is greater than the mass of the first movable electrode portion, it is possible to provide a physical quantity detection element which can improve the sensitivity for detecting physical quantity
Implementation Method 2
a movable body provided on an upper portion of the substrate... in which the movable body includes a first movable body on a first side of the movable body with respect to the beam
Implementation Method 3
capacitance formed between counter electrodes facing the mass body changes. The detection of the physical quantity such as acceleration is performed by measuring the change in capacitance
Data Source
AI summary
A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.