Deep reactive-ion etching forms a topside boss on the diaphragm, reducing mass and improving alignment with circuit elements.
A sensor unit joins an inertial sensor module to an outer case using a ring-shaped joining member with lower elastic modulus.
Capacitance-based feedback control compensates for manufacturing asymmetries and non-linearities to improve acceleration measurement precision.
Segmenting the seismic mass allows high-frequency vibration of a mobile sub-component, shifting measurement away from 1/f noise regions to improve resolution.
Segmented capacitive sensing isolates acceleration signals, removing spurious components caused by temperature drift and aging effects.
A wireless audio device extends a spring-loaded arm during freefall to control impact orientation.
Cross-axis prediction allows the range setting unit to pre-adjust detection ranges, resolving tracking delays and improving accuracy during rapid motion.
Physical quantity sensor with symmetrical electrode fingers and stopper structure.
Server maps omnidirectional images to relative location data, resolving the absence of GPS signals for accurate indoor positioning.
A double-ended tuning fork structure in MEMS accelerometers cancels thermal expansion errors to improve acceleration measurement accuracy.
A hubodometer uses orbiting sensors to detect pendulous assembly rotation and electric actuators to apply countervailing force.
Segmenting the sensing function into two asymmetric masses cancels common-mode substrate stress errors and reduces Brownian noise for higher precision.
Optimized mass distribution enhances sensitivity and impact resistance in physical quantity detection elements by increasing torque and rigidity.
A mechanical suspension system with compliant dampers and metal springs isolates motion sensors from package strain.
Convex base walls on a speed pick-up ring maintain consistent air gaps, eliminating voltage fluctuations caused by noise in variable reluctance sensors.
Electromagnetic induction powers an accelerometer to measure piston acceleration, providing real-time maintenance data without external batteries.
A calibration method uses global positioning system data to determine real-time temperature drift values for inertial measurement units.
A single proof mass MEMS accelerometer design uses mirrored comb capacitors to measure orthogonal acceleration axes.
Variable moment inertia modulation linearizes the response of a torsional oscillator MEMS accelerometer, reducing noise and scale factor errors.
Parallel dual-sensor trajectories with opposite phase signs eliminate additive measurement bias, improving inertial navigation accuracy and reliability.
Adaptive filter subtracts body motion artifacts from pulse wave signals using triaxial acceleration data.
A low-power processor detects motion patterns to adjust geomagnetic sensor sample rates for calibration.