Eccentric Acceleration Sensor Modules for Consistent Detection
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Solution Overview
Problem
Existing acceleration sensor units with multiple MEMS sensors arranged in arrays face accuracy issues due to varying positional relationships between sensors, leading to differences in acceleration reception and reduced accuracy.
Innovation Solution
A sensor unit configuration with two adjacent sensor modules on a substrate, where each module includes an acceleration sensor eccentrically disposed within the other module, allowing for closer arrangement and reduced differences in acceleration reception.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple MEMS acceleration sensors are arranged in an array on a single substrate, then the SN ratio is improved according to the square root of the number of sensors, but the measurement accuracy is lowered due to differences in acceleration reception caused by positional relationships between sensors
Solution Approach 1:
The invention divides the sensor array into multiple independent sensor modules, each containing its own acceleration sensor. These modules are spatially separated and positioned at different locations on the substrate, allowing each module to independently detect acceleration while reducing the impact of positional variations on overall measurement accuracy.
Solution Approach 2:
Each sensor module contains an acceleration sensor that is eccentrically disposed within the module structure. The sensor is positioned offset from the module's geometric center, creating a nested configuration where the sensor is contained within the module but strategically positioned to optimize detection while minimizing positional error effects.
2Quantity of substance
If acceleration sensors are positioned at different locations on the substrate, then more sensors can be arranged to improve SN ratio, but the differences in acceleration reception between sensors increases, reducing accuracy
Solution Approach 1:
Instead of placing multiple sensors in a dense array where positional variations cause measurement inconsistencies, the invention segments the sensor system into multiple modules distributed across the substrate. Each module independently houses one acceleration sensor, allowing for spatial distribution while maintaining measurement consistency through the modular structure.
Solution Approach 2:
Each sensor module is designed with specific local characteristics, including the eccentric positioning of the acceleration sensor within the module. This local quality optimization ensures that each module-sensor combination maintains consistent detection performance regardless of its position on the substrate, allowing multiple sensors to be used without sacrificing accuracy.
Data Source
AI summary
A sensor unit includes: a substrate; a first sensor module that is disposed at the substrate and that includes a first acceleration sensor; and a second sensor module that is disposed at the substrate and includes a second acceleration sensor, in which the first sensor module and the second sensor module are arranged to be adjacent to each other at one surface side of the substrate, the first acceleration sensor is eccentrically disposed at the second sensor module side in the first sensor module, and the second acceleration sensor is eccentrically disposed at the first sensor module side in the second sensor module.