Yaw Rate Sensor Movable Counterelectrode Interference
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Solution Overview
Problem
Existing yaw rate sensors face interference from relative motion between Coriolis electrodes and counterelectrodes, leading to inaccurate capacitance changes and reduced precision in detecting yaw rates perpendicular to the main plane of extension.
Innovation Solution
The yaw rate sensor design includes a movable counterelectrode that vibrates with the Coriolis element along the third direction, eliminating interference signals by ensuring that capacitance changes are primarily caused by yaw rate, rather than motion perpendicular to the main plane, using a drive frame and insulating elements to synchronize vibrations and prevent torsional interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the counterelectrode is fixedly anchored to the substrate, then the detection arrangement is stable, but interference signals are generated by relative motion between the Coriolis electrode and the counterelectrode along the third direction
Solution Approach 1:
The counterelectrode is changed from a fixedly anchored state to a movable state, where it is coupled to the drive frame and moves together with the Coriolis element along the third direction. This dynamic coupling eliminates the relative motion between the Coriolis electrode and counterelectrode, thereby eliminating interference signals while maintaining detection stability.
2Measurement precision
If the Coriolis element is excited to vibration perpendicular to the main plane of extension, then yaw rate detection is enabled, but capacitance changes are induced by motion perpendicular to the main plane rather than by yaw rate
Solution Approach 1:
The counterelectrode is coupled to the drive frame and moves synchronously with the Coriolis element during vibration along the third direction. This synchronous motion ensures that the capacitance between the Coriolis electrode and counterelectrode remains constant during vibration, so that any capacitance change is caused solely by yaw rate, enabling accurate detection.
Solution Approach 2:
The drive frame acts as an intermediary that couples the Coriolis element and counterelectrode together. This intermediary structure ensures that both components move together during vibration, isolating the capacitance measurement from spurious signals and ensuring that capacitance changes reflect only yaw rate information.
3Adaptability or versatility
If multiple Coriolis elements are used to detect yaw rates about different axes, then detection coverage is improved, but device complexity increases
Solution Approach 1:
A single Coriolis element is designed to detect yaw rates about both the first axis (parallel to the main plane of extension) and the second axis (perpendicular to the main plane of extension). The detection arrangement includes Coriolis electrodes that can sense Coriolis forces from rotation about either axis, making the sensor universal and eliminating the need for multiple separate Coriolis elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances precision in detecting yaw rates by minimizing interference signals and allowing for differential evaluation of Coriolis deflections, enabling accurate detection of yaw rates both parallel and perpendicular to the main plane with a single Coriolis element.
Implementation Method 1
the movable substructures having Coriolis elements, and an arrangement being provided to detect deflections of the Coriolis elements caused by a Coriolis force
Implementation Method 2
a change in capacitance between the Coriolis electrode and the counterelectrode in particular is not induced by a motion of the Coriolis element perpendicular to the main plane of extension; instead, such a change in capacitance is caused primarily by the yaw rate
Implementation Method 3
both the Coriolis electrode and the counterelectrode of the detection arrangement are advantageously excited to a vibration perpendicular to the main plane of extension
Data Source
AI summary
A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.