Detector Interconnection Architecture for Higher Bandwidth and Pixel Rate

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Solution Overview

Problem

Existing charged-particle detectors face challenges in achieving high analog signal bandwidth and pixel rate due to parasitic parameters, which affect the performance indicators such as signal-to-noise ratio and maximum inspection speed, despite efforts to minimize these effects.

Innovation Solution

An improved detector architecture with an interconnection layer between analog signal processing circuitry and current- or charge-based analog-to-digital converters, using interconnection switching elements to couple outputs and control activation of multiple analog signal processing circuits, enabling higher analog signal bandwidth and pixel rate without additional digital output capacity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If traditional detector architecture is used, then device complexity is low, but analog signal bandwidth and pixel rate are limited due to parasitic parameters

Engineering Contradiction:
Improveanalog signal bandwidthVSAvoiddetector architecture complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The detector architecture is divided into multiple sections, each with its own signal processing circuit. The interconnection layer segments the coupling between sensing elements and ADCs, allowing independent optimization of each section while reducing overall parasitic effects through distributed architecture.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

An interconnection layer is introduced as an intermediary between the analog signal processing circuitry and the ADCs. This intermediate layer enables flexible coupling and decoupling of signal paths, reducing direct parasitic connections while maintaining signal integrity through controlled switching elements.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If more sensing elements are coupled to increase detection capability, then measurement precision improves, but parasitic parameters increase reducing signal-to-noise ratio

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidparasitic parameters
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The detector employs dynamic switching elements that can selectively activate or deactivate signal paths based on detection needs. This dynamic configuration allows the system to optimize the number of active sensing elements, reducing parasitic accumulation while maintaining measurement precision through adaptive signal path management.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

Sensing elements are organized into sections with dedicated signal processing circuits. This segmentation isolates parasitic effects to local sections rather than accumulating across the entire detector array, maintaining signal-to-noise ratio even as the total number of sensing elements increases.

Inventive Principle:
Principle #1Segmentation

3Productivity

If direct coupling between sensing elements and ADCs is used, then device complexity is low, but pixel rate is limited by parasitic effects

Engineering Contradiction:
Improvepixel rateVSAvoidinterconnection layer complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The interconnection layer acts as a mediator between signal processing circuits and ADCs, using switching elements to dynamically route signals. This intermediate structure reduces direct parasitic coupling while enabling higher pixel rates through flexible, low-capacitance signal paths controlled by the switching elements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS12525426B2Enhanced architecture for high-performance detection device
Publication Date: 2026.01.13 ASML NETHERLANDS BV
  • US12525426B2 patent drawing
  • US12525426B2 patent drawing
  • US12525426B2 patent drawing

AI summary

A detector includes a set of sensing elements, first section circuitry communicatively coupling a first set of sensing elements to an input of first signal processing circuitry, second section circuitry communicatively coupling a second set of sensing elements to an input of second signal processing circuitry, and interconnection circuitry communicatively coupling an output of the first signal processing circuitry to an output of the second signal processing circuitry. The interconnection circuitry may include an interconnection layer having interconnection switching elements communicatively coupled to outputs of analog signal paths of the detector. Interconnection switching elements may communicatively couple the outputs of adjacent analog signal paths. The detector may also include signal processing circuitry that includes a plurality of converters. The interconnection circuitry may be configured to selectively couple outputs of the first and second signal processing circuitry to the converters.