Device Array Analysis Using SHG for Bulk Defect Detection

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Solution Overview

Problem

Existing methods struggle to accurately and efficiently analyze device arrays, particularly in non-linear optics, as second harmonic generation (SHG) processes are limited to surfaces and interfaces, providing insufficient information about bulk materials, especially in centrosymmetric materials.

Innovation Solution

A device array analysis method using a first light signal to generate a second harmonic signal, allowing for image detection and analysis to determine device normalcy or defects, with components like a light source, sampler, detector, and analyzer to process and interpret the SHG signals, and optional features for interference removal and healing defective devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If second harmonic generation (SHG) process is used for device array analysis, then surface and interface characteristics can be detected, but information about bulk materials is insufficient

Engineering Contradiction:

Improvesurface and interface detection capabilityVSAvoidbulk material information

Core Design Contradiction:

Measurement precisionVSLoss of information

Solution Approach 1:

The patent segments the light signal into multiple wavelengths and processes different depth regions separately. By using multiple wavelengths with different penetration depths, the system divides the bulk material analysis into multiple detectable layers, allowing both surface/interface information (via SHG) and bulk material information (via wavelength-dependent absorption) to be obtained without compromising either measurement capability.

Inventive Principle:

Principle #1Segmentation

2Productivity

If quick device array analysis is performed, then productivity is improved, but measurement precision may be compromised

Engineering Contradiction:

Improveanalysis speedVSAvoiddefect detection accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The patent performs preliminary actions by pre-processing the optical signals to remove interference between different light sources before detection. The control unit pre-calculates and subtracts interference patterns, and the system pre-positions multiple light sources to minimize cross-talk. This preliminary processing ensures that quick scanning does not compromise measurement precision, as the interference removal is already completed before the actual defect detection analysis.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If multiple light sources are used for comprehensive analysis, then measurement capability is improved, but interference between signals increases

Engineering Contradiction:

Improveanalysis capabilityVSAvoidsignal interference

Core Design Contradiction:

Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The patent converts the harmful interference between multiple light sources into a beneficial signal processing opportunity. The control unit deliberately uses the known interference patterns generated by multiple light sources as reference signals, then subtracts these known interference patterns from the total detected signal. This approach transforms the harmful interference into a useful reference that enables more accurate defect detection by removing the interference component systematically.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

4Manufacturing precision

If defect density calculation is performed for all devices, then manufacturing precision is improved, but loss of time increases

Engineering Contradiction:

Improvedefect identification accuracyVSAvoidanalysis time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent applies partial action by performing comprehensive defect analysis only on suspicious or critical regions identified through initial rapid scanning. Instead of calculating defect density for every single device in the array, the system first performs a quick overview scan to identify regions with potential defects, then concentrates detailed analysis resources only on those specific areas. This selective approach maintains manufacturing precision for critical defects while significantly reducing the overall analysis time.

Inventive Principle:

Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables quick and accurate determination of device array normalcy or defects, facilitating process adjustments to improve device quality by identifying and correcting defects through image analysis and subsequent processing.

Implementation Method 1

Second harmonic generation (SHG) is a non-linear effect in which light with twice the frequency of an incident light beam is emitted

Methodology Applied

Scientific EffectSecond harmonic generation (SHG): Second Harmonic Generation

Data Source

PatentUS20250321188A1Device array analysis method and analysis apparatus therefor

Publication Date: 2025.10.16 DONGGUK UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION

AI summary

A device array analysis method includes manufacturing a device array including one or more devices, supplying a first light signal to the device array, obtaining an image by detecting a second light signal emitted from the device array, and analyzing the image to determine whether the device array is normal or defective.