Diamond UV Sensor pn Junction for 200 nm Sensitivity

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Solution Overview

Problem

Existing UV radiation sensors struggle to achieve high sensitivity and selectivity for wavelengths ≦220 nm while avoiding interference from visible and infrared radiation.

Innovation Solution

A UV radiation sensor with a vertical structure featuring a pn junction formed by two differently doped monocrystalline diamond areas, where the upper doped area is ≤ 300 nm thick, and the doping concentrations of the diamond layers are optimized to achieve a high spectral sensitivity ratio between 200 nm and 240 nm, reducing electrical leakage currents and enhancing selectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a thicker diamond layer is used to improve structural stability, then mechanical strength is improved, but sensitivity for short-wavelength UV detection decreases

Engineering Contradiction:
Improvestructural stabilityVSAvoidshort-wavelength UV sensitivity
Core Design Contradiction:
StrengthVSMeasurement precision

Solution Approach 1:

The patent applies segmentation by dividing the diamond structure into two distinct layers: an upper layer with thickness ≤300 nm optimized for UV detection sensitivity, and a lower layer providing structural support and mechanical stability. The pn junction is formed at the interface between these two layers, allowing each layer to fulfill its specific function - the thin upper layer captures short-wavelength UV photons efficiently while the thicker lower layer provides structural integrity.

Inventive Principle:
Principle #1Segmentation

2Ease of operation

If Schottky contacts are used for electrical contact on the diamond layer, then electrical contact is achieved, but electrical leakage currents increase during detection

Engineering Contradiction:
Improveelectrical contactVSAvoiddetection accuracy
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent extracts the problematic Schottky contact interface by replacing it with a pn junction formed directly within the diamond layers. Instead of using metal-semiconductor contacts that generate leakage currents, the invention creates a homojunction between p-type and n-type doped diamond regions, which eliminates the Schottky barrier and associated leakage currents while maintaining effective electrical contact and detection capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor achieves a spectral sensitivity ratio of 1:1000, enabling high sensitivity and selectivity for UV-C wavelengths, allowing for interference-free detection of UV radiation.

Implementation Method 1

a radiation-sensitive region (10) of single-crystal diamond... forming a pn junction for radiation detection

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

a material with a sufficiently large band gap, such as diamond, is suitable for the radiation-sensitive area of UV sensors

Methodology Applied
Scientific EffectAbsorption of electromagnetic radiation: Absorption (EM radiation)

Data Source

PatentEP3582267B1UV radiation sensor based on diamond
Publication Date: 2021.03.10 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
  • EP3582267B1 patent drawingFigure 1A~2B

AI summary

The present invention relates to a UV radiation sensor with a radiation-sensitive area made of diamond, which is formed on a first side of a semiconductor substrate (1) and can be electrically contacted via at least two contact electrodes (4, 5). In the proposed UV radiation sensor, the radiation-sensitive area has two differently doped regions (2, 3, 3') made of diamond, which form a pn junction for radiation detection. A UV radiation sensor designed in this way has high sensitivity in the wavelength range ≤ 200 nm.