Diffractive Beam Propagation Camera for Weak Light Analysis

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Solution Overview

Problem

Existing beam propagation cameras face challenges in accurately analyzing light beams with weak intensity, particularly in laser plasma sources, due to the low intensity of reflected infrared radiation, which complicates precise droplet positioning and laser beam adjustment.

Innovation Solution

A beam propagation camera employing a diffractive structure for beam splitting, creating spatially separated sub-beams with longitudinal and lateral focus offsets, allowing for simultaneous recording and improved analysis of beam properties, even with weak light conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a conventional beam propagation camera is used to detect reflected infrared radiation from target droplets, then the system can provide beam analysis capability, but the measurement precision deteriorates due to the weak intensity of the reflected radiation

Engineering Contradiction:
Improvedroplet position detection accuracyVSAvoidreflected infrared radiation intensity
Core Design Contradiction:
Measurement precisionVSIllumination intensity

Solution Approach 1:

The patent divides the incident beam into multiple sub-beams using a diffractive optical element, creating several spatially separated beam paths. This segmentation allows the system to detect multiple diffraction orders simultaneously, each providing information about the droplet position, thereby improving measurement precision despite weak signal intensity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a longitudinal focus offset between different sub-beams in addition to lateral separation. This adds a depth dimension to the beam splitting, enabling the system to capture focus information at different planes simultaneously, which enhances the ability to determine droplet position and beam focus characteristics under low light conditions

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the beam is split into multiple sub-beams with focus offset, then the analysis of beam properties is improved, but the device complexity increases due to the diffractive structure design

Engineering Contradiction:
Improvebeam parameter analysis accuracyVSAvoiddiffractive structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The diffractive optical element serves multiple functions simultaneously: it splits the incident beam into multiple sub-beams, provides lateral spatial separation, introduces longitudinal focus offset, and enables detection of multiple diffraction orders. This multi-functionality improves beam analysis precision while avoiding the need for multiple separate optical components, thereby managing device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The diffractive structure creates multiple copies of the incident beam with different propagation characteristics (lateral positions and longitudinal focuses). These copied sub-beams provide redundant information about the droplet position and beam properties, enhancing measurement accuracy without requiring additional independent measurement systems

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise analysis of light beam properties and geometric parameters, enhancing the accuracy of droplet positioning and laser beam adjustment, even under conditions of low light intensity, with increased design complexity accepting non-trivial focus behavior and diffraction effects.

Implementation Method 1

the beam-splitting optical arrangement has a diffractive structure; and wherein this diffractive structure is configured in such a way that at least two of the sub-beams are spatially separated from one another on the sensor arrangement and have a focus offset in the longitudinal direction

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS11099400B2Beam propagation camera and method for light beam analysis
Publication Date: 2021.08.24 CARL ZEISS SMT GMBH
  • US11099400B2 patent drawing
  • US11099400B2 patent drawing
  • US11099400B2 patent drawing

AI summary

A beam propagation camera has at least one beam-splitting optical arrangement (240) configured to split a beam, which is incident on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera, into a multiplicity of sub-beams, and a sensor arrangement (250) configured to detect the sub-beams. The beam-splitting optical arrangement has a diffractive structure (241) configured such that at least two of the sub-beams are spatially separated from one another on the sensor arrangement and have respective foci longitudinally offset from one another along the optical axis.