Digital MEMS Logic for High Voltage Control

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Solution Overview

Problem

Current MEMS crossbar switches require high gate voltages (10 V to 50 V) for switching, which complicates the technology and leads to power loss and scalability issues in providing control signals for large port-count RF MEMS crossbar switches.

Innovation Solution

The implementation of a digital MEMS logic system with serially connected MEM switch pairs and a high-voltage MEMS buffer, where address decoders provide voltage rails to control MEM switches, allowing for efficient high-voltage control with reduced power consumption and easier scalability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high gate voltages (10 V to 50 V) are used to switch MEM switches in present-day MEMS crossbar switches, then the switching function is achieved, but power loss increases and device complexity increases

Engineering Contradiction:
Improveswitching functionVSAvoidpower loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent divides the high-voltage control system into segmented pairs of MEM switches, where each pair consists of a first MEM switch and a second MEM switch with complementary body connections. This segmentation allows the high voltage to be distributed across series-connected switches, reducing the power loss associated with high gate voltages while maintaining the switching function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent inverts the conventional approach by connecting the bodies of MEM switches to different voltage rails (Vdd0 and ground) in a complementary manner. For the first subset of pairs, the first MEM switch body is connected to ground and the second MEM switch body is connected to Vdd0; for the second subset, these connections are reversed. This inversion enables efficient high-voltage control with reduced power consumption.

Inventive Principle:
Principle #13The other way round (Inversion)

2Reliability

If high gate voltages (10 V to 50 V) are used to switch MEM switches in present-day MEMS crossbar switches, then the switching function is achieved, but device complexity increases

Engineering Contradiction:
Improveswitching functionVSAvoidcontrol signal complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the control system into pairs of MEM switches with complementary body connections to different voltage rails. This segmentation simplifies the control signal generation by allowing address decoders to provide voltage rails that directly control multiple switches in a systematic pattern, reducing the overall complexity of providing control signals for large port-count switches.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates a universal control structure where pairs of MEM switches with complementary body connections can be used throughout the crossbar switch array. This multi-functional approach allows the same control mechanism to be applied uniformly across all switch pairs, simplifying the control signal generation for large port-count switches and improving scalability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If present-day MEMS crossbar switches are scaled to large port-count configurations, then network capacity increases, but power loss increases and scalability becomes difficult

Engineering Contradiction:
Improvenetwork capacityVSAvoidpower loss
Core Design Contradiction:
Adaptability or versatilityVSLoss of energy

Solution Approach 1:

The patent segments the large port-count crossbar switch into multiple pairs of MEM switches with complementary body connections. This segmentation allows the high-voltage control to be distributed systematically across the expanded network, enabling scalability to large configurations while managing power loss through the series connection and complementary body voltage assignments.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent establishes a universal control architecture using pairs of MEM switches that can be replicated and scaled to accommodate large port-count configurations. This multi-functional structure allows the same control mechanism to serve multiple switches efficiently, enabling network capacity expansion while maintaining power efficiency and scalability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Adaptability or versatility

If present-day MEMS crossbar switches are scaled to large port-count configurations, then network capacity increases, but device complexity increases

Engineering Contradiction:
Improvenetwork capacityVSAvoidcontrol signal structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent segments the control structure into systematic pairs of MEM switches with complementary body connections to different voltage rails. This segmentation creates a modular control architecture that can be systematically expanded for large port-count configurations, reducing the complexity of control signal generation by providing a repeatable pattern that scales efficiently.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent creates a universal control structure using pairs of MEM switches that can be replicated across the entire crossbar switch array. This multi-functional approach allows the same control mechanism to be applied uniformly regardless of the port count, enabling scalable network capacity while keeping the control signal structure manageable and systematic.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables low power consumption and easy scalability for providing high-voltage control signals, addressing the limitations of existing high-voltage CMOS circuits and reducing power loss in MEMS crossbar switches.

Implementation Method 1

MEMS (Micro-Electro-Mechanical Switch) technology shows promise in circuits in which very low power loss is desired

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Data Source

PatentUS9318290B2High voltage control with digital MEMS logic
Publication Date: 2016.04.19 CIENA CORP
  • US9318290B2 patent drawing
  • US9318290B2 patent drawing
  • US9318290B2 patent drawing

AI summary

A complex logic gate comprising digital MEM switches, coupled to a high voltage MEMS buffer, to provide a high voltage depending upon gate and body voltages of the digital MEM switches.