Electrostatic/Electro-Adhesion Relays TRIZ Cases
- MEMS RF Switch with Secondary Landing Post for Low-Impact Actuation
A MEMS ohmic switch uses an off-center contact electrode and a secondary landing post to guide the movable plate into gentle contact.
- Multichannel Relay Assembly with In-Line MEMS Switches
In-line MEMS switches in a multichannel relay assembly reduce dispersive leakage while maintaining high power handling capabilities.
- RF MEMS Switch Grating Middle Electrode
A capacitive RF MEMS switch uses a conductive metallic grating as a middle electrode to segment the device structure.
- NEM Relay Memory Cells for Soft Error Upset Immunity
Nano-electromechanical relay switches form nonvolatile memory cells that retain data states without power.
- RF MEMS Switch Pooling Electrode Reduces Driving Voltage
A pooling electrode increases capacitance to lower the driving voltage while preventing stiction in RF MEMS switches.
- Electrostatic Device Bonding Layer Parasitic Capacitance
Segmented bonding portions support conductor layers on a conductive base, reducing parasitic capacitance from SOI BOX electrification.