MEMS Switch Dual-Beam Segmentation for Low-Voltage High-Speed Operation
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Solution Overview
Problem
MEMS switches require high electrostatic forces and long response times due to the need for strong spring forces and high driving voltages, which limits their application in radio communication terminals where fast switching at low voltages is necessary.
Innovation Solution
An electromechanical switch design incorporating a first beam with a weak spring force for high-speed turning on and a second beam with a strong spring force for high-speed turning off, allowing for low-voltage operation and rapid switching by leveraging electrostatic, electromagnetic, piezoelectric, or thermal displacement mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a strong spring force is applied to the movable electrode to enable high-speed switching, then the response time is reduced, but the driving voltage must be increased to overcome the strong spring force
Solution Approach 1:
The switching function is divided into two independent beams: a first beam responsible for high-speed turning on with weak spring force, and a second beam responsible for high-speed turning off with strong spring force. This segmentation allows each beam to be optimized for its specific function without compromising the other, resolving the contradiction between switching speed and driving voltage requirements.
Solution Approach 2:
The system dynamically switches between two different mechanical configurations by activating different beams based on the desired operation (turning on or turning off). The first beam provides weak spring force for low-voltage turning on, while the second beam provides strong spring force for high-speed turning off, making the overall system response dynamic and adaptable to different operational requirements.
2Use of energy by moving object
If the movable electrode is designed with weak spring force to reduce driving voltage, then low-voltage operation is enabled, but the response time increases due to slower switching
Solution Approach 1:
The switching function is divided into two independent beams: a first beam responsible for high-speed turning on with weak spring force, and a second beam responsible for high-speed turning off with strong spring force. This segmentation allows each beam to be optimized for its specific function without compromising the other, resolving the contradiction between switching speed and driving voltage requirements.
Solution Approach 2:
The system dynamically switches between two different mechanical configurations by activating different beams based on the desired operation (turning on or turning off). The first beam provides weak spring force for low-voltage turning on, while the second beam provides strong spring force for high-speed turning off, making the overall system response dynamic and adaptable to different operational requirements.
3Device complexity
If a single beam is used for both turning on and turning off, then the device complexity is reduced, but it cannot achieve both high-speed turning on and turning off simultaneously
Solution Approach 1:
The switching function is divided into two independent beams: a first beam responsible for high-speed turning on with weak spring force, and a second beam responsible for high-speed turning off with strong spring force. This segmentation allows each beam to be optimized for its specific function without compromising the other, resolving the contradiction between switching speed and driving voltage requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-speed switching with low power consumption and reduced damping effects, ensuring high isolation and efficient signal transmission at low driving voltages, suitable for radio communication terminals.
Implementation Method 1
a first electromechanical switch adapted to turn on and off according to a displacement of at least a first beam that is restorable by a relatively weak spring force
Implementation Method 2
a second electromechanical switch adapted to turn on and off according to a displacement of at least a second beam that is restorable by a relatively strong spring force
Implementation Method 3
leveraging electrostatic, electromagnetic, piezoelectric, or thermal displacement mechanisms
Implementation Method 4
leveraging electrostatic, electromagnetic, piezoelectric, or thermal displacement mechanisms
Implementation Method 5
leveraging electrostatic, electromagnetic, piezoelectric, or thermal displacement mechanisms
Data Source
AI summary
The present invention provides an electromechanical switch enabled to achieve a high-speed switching response at a low driving voltage. An electromechanical switch body 10, which is an MEMS switch, has a first movable electrode 14 and a second movable electrode 16, both ends of each of which are respectively fixed to and laid on a first anchor 12 and a second anchor 13 formed on a silicon substrate 2, and also has a fixed electrode 18 that faces these movable electrodes. A first electromechanical switch 22 enabled to be driven at a low voltage is constituted by the first movable electrode 14, which has a relatively weak spring force, and the fixed electrode 18. A second electromechanical switch 24 enabled to be latched at a low voltage is constituted by the second movable electrode 16, which has a relatively strong spring force, and the fixed electrode 18. Consequently, the first movable electrode 14 is displaced at high speed at a low driving voltage, so that the first electromechanical switch is turned on at high speed. A restoring force causes the second movable electrode 16 to perform natural vibrations at high speed, so that the second electromechanical switch is turned off at high speed. The restored second movable electrode 16 is latched at a low driving voltage, so that the second electromechanical switch is turned on.