Direct-Write Variable Impedance Patterning for Integrated Circuits

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Solution Overview

Problem

Conventional integrated circuit and printed circuit board manufacturing techniques are limited in creating conductive and resistive structures with varying impedance values, particularly gradient resistors, due to space and cost constraints, and require complex geometric patterning or the deposition of multiple materials, which increases fabrication time and cost.

Innovation Solution

The use of direct-write variable impedance patterning via nanoparticle-based metallization layers or chemical reaction-based deposition methods, where a low-conductivity nanoparticle material is selectively illuminated or reacted with varying energy levels to form conductive, resistive, and gradient resistive structures with different electrical resistivities from a single material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If geometric patterning is used to create resistive structures by adjusting trace width and length, then resistance values can be controlled, but space requirements increase and fabrication complexity increases

Engineering Contradiction:
Improveresistance value controlVSAvoidtrace area
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The patent applies parameter changes by controlling the deposition energy density during direct-write fabrication. By varying the energy density parameter, the same material can produce different resistivities, enabling resistance control without changing geometric dimensions. This resolves the contradiction by maintaining constant trace area while achieving precise resistance values through energy parameter modulation.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements local quality by creating spatially varying resistivity within a uniform trace geometry. The direct-write process deposits material with locally controlled energy density, resulting in different sections of the same trace having different resistivities. This allows resistance control through local property variation rather than global geometric changes, reducing space requirements.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If multiple materials with different resistivities are deposited to create resistive structures, then resistance values can be controlled, but fabrication cost and time increase

Engineering Contradiction:
Improveresistance value controlVSAvoidfabrication speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent applies universality by using a single material that can assume multiple resistivity states through controlled deposition energy density. The same material and deposition process can produce conductive, resistive, and insulating regions, eliminating the need for multiple specialized materials and deposition processes. This resolves the contradiction by achieving resistance control with one material system, thereby improving fabrication productivity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent uses parameter changes in the deposition energy density to transform a single material into different functional states with varying resistivities. By modulating the energy density parameter during direct-write fabrication, the process can create conductive traces, resistive elements, and insulating regions from the same material, eliminating multiple deposition steps and reducing fabrication time and cost.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for cost-effective and compact fabrication of conductive and resistive structures with tailored resistivities, overcoming limitations of conventional techniques by enabling precise control over impedance values without the need for complex geometric changes or multiple materials, thus facilitating efficient use in high-frequency applications and space-restricted designs.

Implementation Method 1

a low conductivity nanoparticle material is selectively illuminated at different applied energy levels for creating conductive and resistive circuit structures and gradient resistive circuit structures

Methodology Applied
Scientific EffectSelective illumination: Photoconductivity

Implementation Method 2

a non-conductive reactant layer is deposited and a second solution is deposited in varying amounts using an additive deposition for reaction with the reactant layer to form structures with tailored conductivities

Methodology Applied
Scientific EffectChemical reaction-based deposition: Chemical Bonding

Data Source

PatentUS10390433B2Methods of forming conductive and resistive circuit structures in an integrated circuit or printed circuit board
Publication Date: 2019.08.20 TEXAS INSTRUMENTS INC
  • US10390433B2 patent drawing
  • US10390433B2 patent drawing
  • US10390433B2 patent drawing

AI summary

Described examples include methods of fabricating conductive and resistive structures by direct-write variable impedance patterning using nanoparticle-based metallization layers or chemical reaction-based deposition. In some examples, a low conductivity nanoparticle material is deposited over a surface. The nanoparticle material is selectively illuminated at different applied energy levels via illumination source power adjustments and/or scan rate adjustments for selective patterned sintering to create conductive circuit structures as well as resistive circuit structures including gradient resistive circuit structures having an electrical resistivity profile that varies along the structure length. Further examples include methods in which a non-conductive reactant layer is deposited or patterned, and a second solution is deposited in varying amounts using an additive deposition for reaction with the reactant layer to form controllably conductive structures.