Display Manufacturing Chamber Cleaning Via Slidable Flow Control
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Solution Overview
Problem
In the manufacturing of display apparatuses, the deposition material left in the chamber is not adequately cleaned due to variations in cleaning material flow rates, leading to insufficient cleaning in certain areas.
Innovation Solution
A device for manufacturing display apparatuses is designed with a chamber that includes a flow control member and a fixing member, where the flow control member is slidable and coupled to the fixing member, guiding the cleaning material flow effectively to ensure thorough cleaning, especially in corners and edges of the chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the cleaning material flow rate is increased to improve cleaning effectiveness, then the cleaning quality improves, but the cost and complexity of the cleaning system increases
Solution Approach 1:
The patent applies a movable flow control member that can be positioned at different locations within the chamber. This dynamic positioning allows the cleaning material flow to be directed to different areas as needed, improving cleaning effectiveness without requiring a complex high-flow-rate system. The flow control member can be moved to corners or edges where deposition material accumulates, providing targeted cleaning where required.
Solution Approach 2:
The patent implements localized cleaning by directing the cleaning material flow to specific areas (corners and edges) where deposition material is most likely to accumulate. The flow control member enables concentrated cleaning action at these critical locations rather than uniform high-flow cleaning throughout the entire chamber, thereby improving cleaning quality at problem areas without proportionally increasing overall system complexity.
2Reliability
If the cleaning material flow rate is increased to ensure complete cleaning, then the cleaning completeness improves, but the manufacturing cost increases
Solution Approach 1:
The movable flow control member allows the cleaning material to be directed dynamically to different locations including corners and edges. This dynamic targeting ensures complete cleaning of all chamber surfaces, particularly the hard-to-reach areas where deposition material accumulates, without requiring continuously high flow rates throughout the entire chamber. The system can be configured to provide sufficient cleaning flow only where needed.
Solution Approach 2:
The patent focuses cleaning resources on local areas with the highest risk of incomplete cleaning (corners and edges) by positioning the flow control member to direct cleaning material flow to these specific locations. This localized approach ensures cleaning completeness at critical areas while avoiding the unnecessary cost of maintaining high flow rates across the entire chamber volume.
3Device complexity
If a fixed cleaning system is used to simplify the device structure, then the device complexity decreases, but the cleaning effectiveness in corners and edges deteriorates
Solution Approach 1:
The patent introduces a movable flow control member that can be positioned at different locations within the chamber. This simple dynamic element significantly improves cleaning effectiveness in corners and edges by allowing the cleaning material flow to be directed to these hard-to-reach areas. The movability is achieved through a simple coupling mechanism with the fixing member, adding minimal complexity while delivering substantial cleaning performance improvement.
Solution Approach 2:
The flow control member can be pre-positioned or manually positioned before cleaning to target specific corners or edges that are most likely to accumulate deposition material. This preliminary positioning action ensures that the cleaning material flow is already directed to the correct locations when cleaning begins, improving cleaning effectiveness without requiring complex real-time control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures uniform and complete cleaning of the chamber, preventing deposition material residue and enhancing the manufacturing process efficiency.
Implementation Method 1
a flow control member disposed on the at least one of the inner sides of the chamber to correspond to the fixing member and including at least a part disposed under the susceptor, wherein the flow control member may be slidable in a direction upon being coupled to the fixing member
Implementation Method 2
cleaning an inside of the chamber with a cleaning material, wherein the flow of the cleaning material may be guided by the flow control member during the cleaning of the inside of the chamber
Data Source
AI summary
A device for manufacturing a display apparatus may include a chamber, a susceptor disposed in the chamber, a diffuser facing the susceptor, a shadow frame disposed between the susceptor and the diffuser, a fixing member disposed on at least one of inner sides of the chamber, and a flow control member disposed on the at least one of the inner sides of the chamber to correspond to the fixing member and including at least a part disposed under the susceptor, wherein the flow control member is slidable in a direction upon being coupled to the fixing member.