Display Electrode Interconnection via Shared Contact Hole Layout
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Solution Overview
Problem
The existing methods for fabricating display devices are inefficient due to the need for multiple mask processes, which complicate the interconnection of conductive layers and reduce process efficiency.
Innovation Solution
A display device is fabricated using a method that includes a first conductive layer, a passivation layer, a second conductive layer, and a via layer, with a connection pattern that electrically connects the layers through a contact hole, eliminating the need for a separate mask process for connecting the layers, thereby improving process efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple mask processes are used to connect conductive layers, then the interconnection can be achieved, but the process complexity and manufacturing time increase
Solution Approach 1:
The patent combines the functions of multiple separate mask processes into a single integrated contact hole formation process. The contact hole simultaneously penetrates the passivation layer and via layer, and the connection pattern is formed to connect both conductive layers in one step, eliminating the need for separate masking operations while maintaining reliable electrical interconnection between layers.
Solution Approach 2:
The contact hole structure serves multiple functions simultaneously: it penetrates the passivation layer for electrical connection, penetrates the via layer for structural integration, and the connection pattern provides both mechanical support and electrical conductivity. This multi-functional design reduces the number of specialized processes needed.
2Reliability
If multiple mask processes are used to connect conductive layers, then the interconnection can be achieved, but the manufacturing time and process steps increase
Solution Approach 1:
The contact hole is formed to simultaneously expose both the first conductive layer through the passivation layer and the second conductive layer through the via layer in advance. The connection pattern is then deposited to connect both layers in a single continuous process, eliminating the need for sequential masking operations and improving manufacturing throughput.
3Manufacturing precision
If separate mask processes are used for connecting conductive layers, then precise alignment can be achieved, but the process cost and complexity increase
Solution Approach 1:
The alignment function previously requiring separate mask processes is integrated into the single contact hole formation and connection pattern deposition process. The contact hole geometry and connection pattern design inherently provide the necessary alignment between the first and second conductive layers, maintaining precision while reducing process complexity.
Data Source
AI summary
A display device includes a first conductive layer disposed on a substrate, a passivation layer disposed on the first conductive layer, a second conductive layer disposed on the passivation layer, a via layer disposed on the second conductive layer, a third conductive layer disposed on the via layer, the third conductive layer including a first electrode, a second electrode, a connection pattern, the first electrode, the second electrode, and the connection pattern being spaced apart from each other, and a light emitting element, a first end and a second end of the light emitting element being disposed on the first electrode and the second electrode, respectively, wherein the connection pattern electrically connects the first conductive layer and the second conductive layer through a first contact hole penetrating the via layer and the passivation layer.