Display Electrode Insulation Structure for Step Gap Filling
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Solution Overview
Problem
The thickness of the gate electrode in thin-film transistors is increased to lower resistance, leading to gaps in the inorganic insulating layer due to steps between the insulating layers and the gate electrode, which affects the structural integrity and performance of display apparatuses.
Innovation Solution
An additional insulating layer, comprising silicon, oxygen, and carbon with a specific atomic ratio, is disposed to alleviate these gaps, with varying thicknesses and angles to match the electrode's structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the thickness of the gate electrode is increased to lower resistance, then electrical conductivity is improved, but gaps are formed in the inorganic insulating layer due to steps between layers
Solution Approach 1:
An additional insulating layer is introduced as an intermediary between the thick gate electrode and the inorganic insulating layer. This intermediate layer fills the step gap created by the thick electrode, allowing the inorganic insulating layer to be deposited continuously without gaps, thus maintaining both electrical conductivity and structural integrity
Solution Approach 2:
The problem is solved by adding another dimensional layer (the additional insulating layer) to compensate for the height difference caused by the thick gate electrode. This extra dimension allows the insulating layers to overlap properly and eliminates gaps without reducing the electrode thickness
Data Source
AI summary
A display apparatus includes a first insulating layer, a first electrode disposed on the first insulating layer and including a lower surface in contact with an upper surface of the first insulating layer, an upper surface opposite to the lower surface, and a side surface connecting the upper surface to the lower surface, an inorganic insulating layer disposed on the first electrode, overlapping the upper surface and the side surface of the first electrode, and including an inorganic insulating material, and a second insulating layer disposed on the inorganic insulating layer, where a first portion and a second portion of an upper surface of the inorganic insulating layer face each other with a gap around a point where the upper surface of the first insulating layer and the side surface of the first electrode meet each other, and a portion of the second insulating layer is disposed in the gap.