Display Electrode Layout for Sub-Resolution Gap Patterning
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Solution Overview
Problem
Existing display technologies face limitations in patterning processes, particularly in achieving electrode spacing smaller than the resolution limit, which affects the precision and efficiency of display device fabrication.
Innovation Solution
A display device design with electrodes spaced apart by a distance smaller than the patterning process limit, utilizing a specific insulating layer configuration that includes an opening wider than the electrode gap, allowing direct electrical contact through connection electrodes, and additional insulating patterns on sidewalls to enhance precision and alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional mask-based patterning is used, then the patterning process is simple and reliable, but the electrode spacing cannot be smaller than the process resolution limit
Solution Approach 1:
The patterning process is divided into multiple steps: first forming a preliminary pattern with conventional mask-based lithography, then using a second patterning step with a different mask orientation to create the final fine-pitch electrode pattern. This segmentation allows achieving spacing below the original process resolution limit by combining two coarser patterns.
Solution Approach 2:
The solution introduces a second patterning dimension by applying masks at different orientations (e.g., 0度和45度). By patterning in multiple dimensional directions and combining the results, the effective resolution exceeds the limit of single-direction mask patterning, enabling smaller electrode spacing.
2Productivity
If electrode spacing is reduced below patterning resolution limit, then device performance improves, but patterning precision deteriorates
Solution Approach 1:
The patterning is segmented into multiple lithography steps with different mask orientations. Each step creates a relaxed pattern that is later combined, allowing the final pattern to achieve finer effective pitch than any single step could produce alone, thus maintaining precision while enabling reduced spacing.
Solution Approach 2:
The patent uses an intermediary patterning approach where preliminary patterns serve as intermediates. These intermediate patterns from first lithography step act as a foundation, and the second lithography step modifies them to achieve the final fine-pitch structure, effectively using the intermediate state to bridge the gap between coarse lithography and fine features.
3Manufacturing precision
If multiple insulating layers with openings are added, then electrical connectivity and alignment precision improve, but device structure complexity increases
Solution Approach 1:
The insulating layers are designed with local variations: full coverage in most areas for protection and insulation, but with strategic openings in specific locations where electrical connectivity is needed. This local differentiation provides precise alignment control where required while maintaining simple continuous insulation elsewhere, balancing precision and complexity.
Data Source
AI summary
A display device includes a first electrode and a second electrode, a first insulating layer covering the first electrode and the second electrode, light emitting elements disposed on the first insulating layer, a first connection electrode disposed on the first electrode and contacting an end of each of the light emitting elements, a second connection electrode spaced apart from the first connection electrode and disposed on the second electrode and contacting another end of each of the light emitting elements, a second insulating layer disposed on the first insulating layer and at least partially covering the first connection electrode and the second connection electrode, and a third insulating layer disposed on part of the second insulating layer, wherein the second insulating layer comprises an opening overlapping a part between the first connection electrode and the second connection electrode spaced apart from each other.