Display Electrode Stack With Al/Ti Layers for Precise Etching
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Solution Overview
Problem
The challenge in semiconductor component manufacturing is the difficulty in precisely controlling the thickness of conductive features formed by stacking multiple material layers, which affects the performance of semiconductor components.
Innovation Solution
A display device design that includes a substrate with a conductive feature comprising a protective layer of titanium and a conductive layer of aluminum, along with a conductive pad of nickel and gold, which ensures precise thickness control and improved electrical transmission efficiency through the use of an Al/Ti or Al/Mo structure, and a conductive line with a protective, conducting, and cover layers for enhanced electrical transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conductive features are formed by stacking multiple material layers to improve electrical connection, then the conducting effect is enhanced, but the manufacturing precision of thickness control deteriorates
Solution Approach 1:
The patent employs composite material structures (Al/Ti or Al/Mo layers) where a thick aluminum conductive layer provides excellent electrical conductivity, while a thin protective layer of titanium or molybdenum enables precise thickness control through uniform etching. This composite structure resolves the contradiction by combining materials with complementary properties: aluminum for high conductivity and titanium/molybdenum for controllable thickness and etching uniformity.
2Manufacturing precision
If a protective layer is added to the conductive feature to improve thickness control, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The patent changes the material parameter selection to resolve the contradiction. By choosing titanium or molybdenum as the protective layer material with specific thickness ratios (thin protective layer compared to the conductive layer), the patent achieves precise thickness control through uniform etching behavior while keeping the overall structure relatively simple and manageable.
Data Source
AI summary
A display device includes a substrate, a transistor, a first conductive feature, a conductive pad and a light-emitting device. The substrate has a first area. The transistor is located in the first area. The first conductive feature is located over the transistor and electrically connects a source/drain of the transistor. The first conductive feature includes a first protective layer and a first conductive layer. The first protective layer has a first thickness and at least includes titanium. The first conductive layer is located above the first protective layer, has a second thickness and includes aluminum. The second thickness is greater than the first thickness. The conductive pad is located on the first conductive feature and electrically connects the first conductive feature. The conductive pad at least includes nickel and gold. The light-emitting device is located on the conductive pad and electrically connects the conductive pad.