Display Base Layer Contrast for Real-Time Etching Detection

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Solution Overview

Problem

Current display device manufacturing lacks a method to determine the etch rate or etching defects in real-time, making it difficult to ensure proper exposure of the pad layer during the etching process, which can lead to process defects and reduced yield.

Innovation Solution

A display device design featuring a first base layer and a second base layer with different colors and light transmittance, where the second sub-base layer has a lower light transmittance than the first sub-base layer, allowing for real-time monitoring of etching completion by comparing the image clarity of the etched area with a reference value.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single uniform base layer is used, then the manufacturing process is simple, but real-time monitoring of etching completion is not possible

Engineering Contradiction:
Improveetching completion detectionVSAvoidbase layer structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The base layer is divided into multiple sub-layers (first sub-base layer, second sub-base layer, third sub-base layer) with different light transmittances. This segmentation allows optical monitoring of etching progress through the stack, enabling real-time detection of etching completion while maintaining a manageable layered structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different sub-layers are assigned different light transmittance properties (first sub-base layer has higher transmittance, second has lower transmittance, third has intermediate transmittance). This local quality differentiation creates optical contrast that enables visualization of etching progression through the base layer stack.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If the second sub-base layer has very low light transmittance, then etching monitoring is improved, but light transmission for display performance is reduced

Engineering Contradiction:
Improveetching defect detectionVSAvoidlight transmittance
Core Design Contradiction:
Measurement precisionVSIllumination intensity

Solution Approach 1:

The base layer is segmented into multiple sub-layers with graded light transmittances rather than using a single low-transmittance layer. The second sub-base layer provides monitoring contrast, while the first and third sub-base layers with higher transmittances ensure sufficient light transmission for display performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The light transmittance parameter is varied across different sub-layers instead of being uniform. The second sub-base layer has lower transmittance for monitoring, while other sub-layers maintain higher transmittance to balance monitoring needs with display optical performance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables real-time determination of etching completion, reducing the risk of process defects and improving yield by clearly exposing the pad layer, thus facilitating stable electrical connections during the outer lead bonding process.

Implementation Method 1

A light transmittance of the second sub-base layer may be lower than a light transmittance of the first sub-base layer

Methodology Applied
Scientific EffectLight transmittance difference: Absorption (EM radiation)

Data Source

PatentUS20230411580A1Display device and method of manufacturing the same
Publication Date: 2023.12.21 SAMSUNG DISPLAY CO LTD
  • US20230411580A1 patent drawing
  • US20230411580A1 patent drawing
  • US20230411580A1 patent drawing

AI summary

A display device includes: a first base layer including opening; a pad layer disposed on the first base layer, the pad layer overlapping the opening; a second base layer disposed on the pad layer; a pixel circuit layer disposed on the second base layer; and light emitting elements disposed on the pixel circuit layer, the light emitting elements connected to the pixel circuit layer and included in pixels. A color of the first base layer is different from a color of the second base layer.