Display Device Light Shielding Layer and Column Spacer Formation
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Solution Overview
Problem
The existing manufacturing processes for display devices face challenges in forming a light shielding layer and column spacers simultaneously with reduced errors, particularly as the number of tones in the exposure mask increases, leading to potential manufacturing errors.
Innovation Solution
A method and structure where a first and second column spacer, and a light shielding layer are collectively formed using an exposure mask with three or less tones, with the first column spacer having a greater height and the same thickness as the second column spacer, both protruding from the light shielding layer, and all made of the same material, to simplify the manufacturing process and reduce errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If an exposure mask with multiple tones is used to simultaneously form a light shielding layer and column spacers, then the manufacturing process is simplified, but the likelihood of manufacturing errors increases
Solution Approach 1:
The exposure mask is divided into distinct regions with different light transmittance characteristics: a first region that fully transmits light for forming column spacers, a second region that partially transmits light for forming the light shielding layer, and a third region that blocks light. This segmentation allows simultaneous formation of different structures with a single mask while maintaining precise control over the exposure process and reducing manufacturing errors.
2Adaptability or versatility
If the number of tones in the exposure mask increases to form complex patterns, then the ability to form different structures simultaneously is improved, but the complexity of the exposure mask increases
Solution Approach 1:
Different regions of the exposure mask are assigned different light transmittance properties tailored to their specific function: the first region has high transmittance for column spacer formation, the second region has partial transmittance for light shielding layer formation, and the third region has zero transmittance. This local differentiation enables versatile structure formation while keeping the overall mask design manageable.
3Manufacturing precision
If column spacers and light shielding layer are formed in separate processes, then manufacturing precision is maintained, but the manufacturing time and complexity increase
Solution Approach 1:
The formation of column spacers and light shielding layer is merged into a single exposure and development process using a specially designed multi-region exposure mask. This combining eliminates the need for separate processing steps, reducing manufacturing time and complexity while maintaining precision through the carefully designed regional transmittance characteristics of the mask.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the likelihood of errors during the manufacturing process by using a simpler exposure mask with fewer tones, ensuring accurate formation of the light shielding layer and column spacers, thereby enhancing the operational efficiency of the display device.
Implementation Method 1
exposing the first photosensitive composition by disposing a first exposure mask on the first photosensitive composition and irradiating light on to the first photosensitive composition
Data Source
AI summary
A display device includes: a first substrate; a wiring unit on the first substrate and including a thin film transistor; a protection layer on the wiring unit and having at least a concave portion; and a light shielding unit on the protection layer, wherein the light shielding unit includes: a light shielding layer; a first column spacer protruding from the light shielding layer; and a second column spacer on the concave portion and protruding from the light shielding layer to be spaced apart from the first column spacer.