Display Mask Frame Segmentation and Laser Marking
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Solution Overview
Problem
The existing deposition apparatuses for manufacturing display devices face issues such as substrate damage due to sagging masks and poor deposition quality from foreign substances, leading to inconsistent layer formation.
Innovation Solution
The proposed solution involves a mask design with a frame structure that includes intersecting first and second frames, protrusions along the circumference, and laser marks generated by irradiating a laser beam, which helps prevent sagging and ensures uniform deposition by maintaining the mask's shape and position relative to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional mask is used in the deposition apparatus, then the deposition process can be performed, but the mask sags causing substrate damage and poor deposition quality
Solution Approach 1:
The mask frame is divided into multiple segments (first frames extending in a first direction and second frames extending in a second direction) that intersect to form a grid structure. This segmentation provides multiple support points that prevent sagging while maintaining the overall mask integrity and shape stability during deposition.
Solution Approach 2:
Laser marks are formed on the mask frame before the deposition process. These pre-formed laser marks serve as reference markers that help maintain proper mask positioning and shape, preventing sagging-induced substrate damage and ensuring consistent deposition quality throughout the process.
2Productivity
If the mask sags, then deposition may occur, but foreign substances are irradiated and deposition is poor
Solution Approach 1:
Instead of trying to prevent foreign substance contamination after it occurs, the invention inverts the approach by using laser marks on the mask frame to proactively maintain proper mask positioning and shape. This prevents the mask from sagging into positions where it would expose the substrate to foreign substances, thereby preventing contamination before it affects deposition quality.
3Ease of manufacture
If the mask structure is simplified, then manufacturing is easier, but the mask cannot maintain uniform distance from the substrate
Solution Approach 1:
The invention changes the physical parameters of the mask frame by forming laser marks on its surface. These laser marks alter the local properties of the frame material, creating reference points that help maintain uniform distance between the mask and substrate during deposition, thereby improving manufacturing precision without complicating the overall mask structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the stability of the mask, prevents substrate damage, and improves deposition quality by maintaining uniform distance and preventing sagging, thereby reducing defects and ensuring consistent layer formation on the substrate.
Implementation Method 1
a plurality of laser marks located on at least one of the plurality of first frames and the plurality of second frames and generated by irradiating a laser beam
Data Source
AI summary
An apparatus for manufacturing a display device includes a mask arranged to face a substrate and a deposition source arranged to face the mask, wherein the mask includes a frame that includes a plurality of first frames that extend in a first direction and a plurality of second frames that extend in a second direction that intersects the first direction, an opening defined by the plurality of first frames and the plurality of second frames, and a plurality of laser marks located on at least one of the plurality of first frames and the plurality of second frames and generated by irradiating a laser beam.