Top-Gate Display Panel Structure to Block Oxygen Diffusion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In current display technologies, passivation layers react with conductor parts in top-gate transistors, leading to increased oxygen in active layers, reduced oxygen vacancies, and abnormal device turn-on due to resistance increases.
Innovation Solution
A display panel design that includes conduction protective parts made of metal oxide or metal materials, disposed between the conductor parts and passivation layers, to prevent reaction and diffusion, ensuring stable resistance and performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If passivation layers are formed by TiOx or AlOx, then passivation function is improved, but oxygen diffusion into conductor parts increases causing resistance increase
Solution Approach 1:
The patent introduces an intermediate protective layer between the passivation layer and the conductor parts. This protective layer acts as a mediator that prevents direct contact and oxygen diffusion from the passivation layer to the conductor parts, thereby solving the problem of resistance increase while maintaining the passivation function.
Solution Approach 2:
The patent divides the original single-layer structure into multiple layers: a passivation layer, an intermediate protective layer, and conductor parts. By segmenting the structure, the harmful oxygen diffusion path is interrupted, and each layer can perform its specific function independently.
2Manufacturing precision
If higher power is used to deposit passivation layers, then deposition quality is improved, but reaction with conductor parts increases
Solution Approach 1:
The protective layer serves as an intermediary barrier that prevents the high-power deposition process from causing direct reaction between the passivation layer and conductor parts. This allows high-quality deposition without the harmful side effects.
Solution Approach 2:
The patent applies a protective layer beforehand to cushion or protect the conductor parts from the high-power deposition process. This prior protection prevents the harmful reactions that would otherwise occur during high-power passivation layer deposition.
3Reliability
If oxygen content in active layers increases, then passivation effect is improved, but oxygen vacancies reduce causing resistance increase
Solution Approach 1:
The protective layer acts as a barrier that prevents oxygen from the passivation layer from diffusing into the active layers. This maintains the oxygen vacancy concentration in the active layers, preventing resistance increase while still providing passivation effect.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents the passivation layers from reacting with conductor parts, maintaining stable resistance and preventing abnormal device turn-on, while enhancing the encapsulation effect and reliability of the display panel.
Implementation Method 1
during the sputtering process
Implementation Method 2
oxygen in the passivation layers easily enters the conductor parts
Data Source
AI summary
A display panel and a manufacturing method thereof are disclosed. The display panel includes an oxide active part, a gate electrode, conduction protective parts, a passivation part, and a source-drain electrode. The oxide active part includes a semiconductor part and conductor parts, and the passivation part is disposed on the gate electrode and the conduction protective parts. The source-drain electrode is disposed on one side of the conduction protective parts and the oxide active part and is connected to the conductor parts. Therefore, a reaction between the passive part and the conductor parts is less likely to occur, thereby ensuring a performance of the display panel.