Display Panel Spacer Alignment for Mask Plate Precision

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Solution Overview

Problem

Current display panel manufacturing techniques using fine metal masks (FMM) face challenges in accurately aligning mask plate holes with pixel positions, resulting in low pixel resolution and poor display effects due to the small size of the mask plate holes and alignment inaccuracies.

Innovation Solution

The implementation of spacers with a specific cross-sectional area taper and arrangement on the pixel definition layer, allowing for precise alignment of the mask plate holes with the spacers during vapor deposition, thereby improving the alignment accuracy and pixel resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the holes of the FMM mask plate are made small to achieve fine metal mask patterning, then the manufacturing precision of the display panel is improved, but the alignment accuracy between the mask plate holes and pixels deteriorates

Engineering Contradiction:
Improvemask patterning precisionVSAvoidalignment accuracy
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent introduces positioning spacers as intermediary structures between the mask plate and the pixel definition layer. These spacers serve as reference markers that facilitate accurate alignment during the vapor deposition process, enabling precise positioning even when the mask holes are extremely small. The spacers act as a mediator that bridges the alignment challenge between fine mask features and pixel positions.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The positioning spacers are formed in advance on the pixel definition layer before the mask plate is positioned. This preliminary action creates predetermined alignment references that guide the mask plate placement, ensuring that the alignment is established before the actual vapor deposition occurs, thereby improving both manufacturing precision and alignment accuracy.

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If the mask plate is positioned using conventional methods, then the manufacturing process is simple, but the alignment accuracy between mask plate holes and pixels is poor

Engineering Contradiction:
Improvepositioning process simplicityVSAvoidalignment accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The positioning spacers serve as intermediary reference structures that simplify the positioning process. Instead of directly aligning the mask plate with the pixel definition layer, the spacers provide easily identifiable reference points that guide the mask plate placement, making the alignment process more straightforward while significantly improving accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The positioning spacers are formed as part of the pixel definition layer structure itself, using the same photolithography and etching processes. This self-service approach means the alignment references are automatically created during normal manufacturing without requiring additional complex positioning equipment or procedures, maintaining ease of manufacture while improving precision.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the aperture ratio and pixel resolution of the display panel, leading to improved display effects by ensuring accurate alignment of the mask plate with the spacers during the vapor deposition process.

Implementation Method 1

Organic material vapor-deposition process refers to a process in which an organic light-emitting material is vapor-deposited in specific pixels of a backplane by using the FMM technique

Methodology Applied
Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentUS11411207B2Display panel and method of manufacturing same
Publication Date: 2022.08.09 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTD
  • US11411207B2 patent drawing
  • US11411207B2 patent drawing
  • US11411207B2 patent drawing

AI summary

A display panel and a method of manufacturing the display panel are provided. The display panel includes an array substrate, a pixel definition layer, and spacers. Each of spacers includes a bottom surface and a top surface. A cross-sectional area of the top surface is less than a cross-sectional area of the bottom surface. A horizontal distance from a center to a side of the spacer gradually increases from the top surface to the bottom surface. Moreover, holes of the mask plate corresponding to positions of the spacers are defined, which ensures accuracy of photolithography and display effect of the display panel.