Aluminum-Alloy Display Wiring Structure for Hillock and Resistance Control
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Solution Overview
Problem
High-temperature processing in display devices can lead to hillock formation on aluminum wiring, increasing electrical resistance and side roughness, and existing capping layers may exacerbate these issues while trying to prevent hillock occurrence.
Innovation Solution
A display device with conductive layers formed from aluminum alloys, including nickel and lanthanum, with controlled atomic percentages to minimize hillock formation and maintain low electrical resistance, and a manufacturing method that includes heat-treating the active layer and carefully forming contact holes to prevent damage to the conductive layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a capping layer including titanium is formed on an aluminum wiring layer to prevent hillock occurrence, then hillock formation is suppressed, but the side roughness of the wiring excessively increases when the thickness of the capping layer increases
Solution Approach 1:
The patent uses a composite capping layer structure with multiple materials (titanium nitride and aluminum oxide) instead of a single material. This composite approach allows optimization of both hillock prevention and surface smoothness properties by combining the beneficial characteristics of different materials in specific thickness ratios.
Solution Approach 2:
The patent optimizes the thickness parameters of the capping layer components, specifically setting the aluminum oxide layer thickness to 50-200 nm and the titanium nitride layer thickness to 5-50 nm. By precisely controlling these parameter ranges, the patent achieves both effective hillock prevention and acceptable side roughness.
2Manufacturing precision
If the number of pixels per unit area is increased to achieve high resolution, then display quality is improved, but the need for low electrical resistance wiring becomes more critical
Solution Approach 1:
The patent extracts the electrical resistance problem from the overall system performance by specifically optimizing the wiring material and structure. By focusing on improving wiring conductivity through material selection and protective layering, the patent enables higher pixel densities without compromising signal transmission quality.
Data Source
AI summary
A display device includes a base substrate, a buffer layer disposed on the base substrate, an active layer disposed on the buffer layer, a first gate insulation layer disposed on the active layer, a first conductive layer disposed on the first gate insulation layer and which is a single-layer including an aluminum alloy, a second gate insulation layer disposed on the first conductive layer, a second conductive layer disposed on the second gate insulation layer and which is a single-layer including an aluminum alloy, an insulation interlayer disposed on the second conductive layer, and a third conductive layer disposed on the insulation interlayer, directly contacting the first conductive layer through a first gate contact hole defined in the insulation interlayer and the second gate insulation layer, and directly contacting the second conductive layer through a second gate contact hole defined in the insulation interlayer.