Oxide Semiconductor Display Wiring With Titanium Hydrogen Barrier

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Solution Overview

Problem

Display devices face challenges in achieving low resistance and high thermal stability for driving signal lines while maintaining easy processability, which affects display quality and resolution.

Innovation Solution

The implementation of a display device structure that includes a substrate with a corrosion prevention layer, a conductive layer made of aluminum or aluminum alloy, insulating films, and a barrier layer of titanium, which helps in reducing signal delays and improving resolution by preventing corrosion and hydrogen diffusion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If aluminum or aluminum alloy is used for conductive layers to achieve low resistance, then electrical conductivity is improved, but corrosion resistance deteriorates

Engineering Contradiction:

Improvecorrosion resistanceVSAvoidcorrosion

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

A corrosion prevention layer is introduced as an intermediary between the aluminum-based conductive layer and the environment. This layer acts as a mediator that prevents direct contact between the corrosive environment and the aluminum, thereby protecting the conductive layer from corrosion while maintaining its electrical conductivity.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The conductive structure is designed as a composite system combining aluminum (for low resistance) with a corrosion prevention layer (for protection). This composite approach allows the system to simultaneously achieve the electrical conductivity of aluminum and the corrosion resistance of the protective layer.

Inventive Principle:

Principle #40Composite materials

2Ease of manufacture

If simple conductive structures are used to maintain easy processability, then manufacturing complexity is reduced, but signal delays increase

Engineering Contradiction:

ImproveprocessabilityVSAvoidsignal delay

Core Design Contradiction:

Ease of manufactureVSLoss of time

Solution Approach 1:

The conductive layer is designed as a composite structure with multiple functional layers (corrosion prevention layer, aluminum conductive layer, barrier layer). This composite structure maintains ease of manufacture through standardized deposition processes while reducing signal delays by optimizing the electrical properties of each layer.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The electrical parameters of the conductive system are optimized by controlling the thickness and composition of each layer. By adjusting these parameters, the overall resistance is reduced, thereby decreasing signal delays while maintaining compatibility with existing manufacturing processes.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If barrier layers are added to prevent hydrogen diffusion, then reliability is improved, but device complexity increases

Engineering Contradiction:

Improvehydrogen barrier performanceVSAvoidlayer structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The barrier layer is merged with the existing conductive layer structure, forming an integrated composite layer. This approach provides hydrogen barrier functionality without requiring completely separate additional processing steps, thereby limiting the increase in device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The barrier layer is incorporated as part of the composite conductive structure. By combining the barrier function with the conductive layers, the patent achieves hydrogen diffusion prevention while maintaining a relatively streamlined device architecture.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances display quality by reducing signal delays and maintaining low resistance, thereby improving resolution and reliability of the display device.

Implementation Method 1

a second conductive layer on the second insulating film and including a barrier layer, which includes (e.g., is) titanium, and a main conductive layer, which includes (e.g., is) aluminum or an aluminum alloy, wherein the semiconductor layer includes (e.g., is) an oxide semiconductor, and the barrier layer is between the semiconductor layer and the main conductive layer

Methodology Applied

Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 2

a corrosion prevention layer on the substrate and including (e.g., being) an inorganic material, a first conductive layer on the corrosion prevention layer and including (e.g., being) aluminum or an aluminum alloy

Methodology Applied

Scientific EffectCorrosion prevention:

Data Source

PatentUS12016211B2Display device

Publication Date: 2024.06.18 SAMSUNG DISPLAY CO LTD

AI summary

A display device includes a substrate, a corrosion prevention layer on the substrate and including an inorganic material, a first conductive layer on the corrosion prevention layer and including aluminum or an aluminum alloy, a first insulating film on the first conductive layer, a semiconductor layer on the first insulating film and including a channel region of a transistor, a second insulating film on the semiconductor layer, and a second conductive layer on the second insulating film and including a barrier layer, which includes titanium, and a main conductive layer, which includes aluminum or an aluminum alloy, wherein the semiconductor layer includes an oxide semiconductor, and the barrier layer is between the semiconductor layer and the main conductive layer and overlaps the channel region of the transistor.