Double Ended Electrode Manipulator for Ion Beam Alignment
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Solution Overview
Problem
In semiconductor processing, large electrodes in ion implanters face challenges in maintaining a uniform ion beam due to mechanical misalignments and thermal expansion, making it difficult to support and adjust the position of electrodes effectively as ion beams increase in size or energy.
Innovation Solution
An electrode adjustment assembly with independently actuatable first and second manipulators at each end of the electrode, allowing for selective movement along multiple axes to adjust the position and orientation of the electrode assembly, thereby controlling ion beam parameters such as beam current and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a single manipulator supports one end of a large electrode, then the electrode can be positioned, but the electrode becomes difficult to support and adjust accurately as it increases in size
Solution Approach 1:
The electrode support system is segmented into two independent manipulators, each supporting one end of the electrode. This division allows each manipulator to handle smaller portions of the electrode, improving control and positioning accuracy while maintaining ease of operation for large electrodes
2Adaptability or versatility
If electrodes are made larger to handle increased ion beam sizes, then ion beam capacity increases, but mechanical misalignments and positioning difficulties increase
Solution Approach 1:
By using two independent manipulators to support each end of the electrode, the system can accommodate larger electrode sizes for increased ion beam capacity while maintaining precise alignment through independent positioning control of each electrode end
Solution Approach 2:
The independent manipulators provide dynamic positioning capability, allowing real-time adjustment of electrode position and orientation to correct mechanical misalignments while maintaining the adaptability needed for varying ion beam sizes and energies
3Manufacturing precision
If electrode position is adjusted to correct misalignments, then ion beam uniformity improves, but system complexity increases with additional manipulators
Solution Approach 1:
The use of two independent manipulators, while increasing component count, provides segmented control that enables precise correction of misalignments at each electrode end, improving ion beam uniformity through localized adjustment capability
Data Source
AI summary
An electrode adjustment method and apparatus are disclosed for use in workpiece processing. The assembly may include an electrode assembly having first and second ends. First and second manipulators may be coupled to the first and second ends. The manipulators may be used to selectively impart movement to the first and second ends of the electrode assembly to adjust one or more properties of an ion beam passing through the electrodes. The first and second manipulators may be independently actuatable so that the first and second ends of the electrode can be adjusted independent of one another. Methods of using the disclosed apparatus are also disclosed.