Double-Lever MEMS Coupling for Anti-Phase Gyroscope Sensing
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Solution Overview
Problem
Existing MEMS gyroscopes with single-lever coupling systems face issues of unbalanced mass systems, increased noise due to high common-mode resonance frequencies, and inefficient space utilization, which affect the accuracy of Coriolis signal detection.
Innovation Solution
A coupling system utilizing two interconnected levers, a seesaw lever and a force-displacement lever, aligned on a lateral axis, to promote anti-phase oscillation and minimize common-mode motion, with flexible joints and suspenders to maintain symmetry and reduce rotational disturbances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a single-lever coupling system is used to promote anti-phase oscillation, then the coupling between proof masses is improved, but the mass system becomes unbalanced which induces unwanted rotational motion
Solution Approach 1:
The patent applies asymmetry by positioning the suspension points of the first and second proof masses at different locations relative to their respective lever attachment points. Specifically, the first suspension point is offset from the first attachment point, while the second suspension point is positioned differently, creating an asymmetric configuration that balances the overall system and eliminates unwanted rotational motion while maintaining anti-phase oscillation stability.
2Device complexity
If a single-lever coupling system is used, then the structure is simplified, but space utilization is inefficient and noise from common-mode resonance remains high
Solution Approach 1:
The patent segments the coupling system into two separate single-lever coupling systems instead of using one complex double-lever system. Each lever operates independently to couple one proof mass to the other, which simplifies the individual component design while collectively achieving better space utilization and reduced common-mode resonance noise through the segmented configuration.
Solution Approach 2:
The patent utilizes the vertical dimension by offsetting the suspension points of the proof masses from each other in the vertical direction. This dimensional arrangement allows the levers to be positioned at different heights, improving space utilization and reducing interference between the coupling mechanisms while maintaining effective anti-phase coupling.
3Ease of operation
If proof masses are suspended to allow easy oscillation in sense mode, then the sense oscillation is improved, but external vibrations can mask the weak Coriolis signal
Solution Approach 1:
The patent employs the two proof masses as counterweights that oscillate in anti-phase. When external vibrations affect both masses equally (common-mode acceleration), their differential movement cancels out the vibration effects, allowing the weak Coriolis signal to be detected accurately while maintaining easy sense oscillation through the anti-phase coupling mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed system enhances the robustness against external vibrations, reduces noise, and optimizes space utilization by ensuring balanced force transfer between proof masses, improving the accuracy of Coriolis signal detection.
Implementation Method 1
A first seesaw lever is suspended from a first anchor point by at least one flexible first suspender... A second force-displacement lever is suspended from a second anchor point by at least one flexible second suspender
Implementation Method 2
The first lateral anti-phase coupling structure promotes anti-phase oscillation and resists common-mode movement
Implementation Method 3
A joint connects the first seesaw lever to the second force-displacement lever... A joint connection point on the first seesaw lever to a second joint connection point on the second force-displacement lever
Data Source
Figure 1a~1c
Figure 2a~2b
Figure 2c~3b
AI summary
A microelectromechanical resonator where two proof masses are coupled with an antiphase coupling structure which comprises a seesaw lever and a force-displacement lever. A joint extends from the seesaw lever to the force-displacement lever and a mass connection element extends from each proof masse to the adjacent lever.