Double-tilt TEM Sample Holder with Piezoelectric Drive
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Solution Overview
Problem
Current commercialized in-situ mechanical sample holders for TEM lack the ability to perform double-axis tilt, limiting the ability to obtain clear electron diffraction patterns and high-resolution images at the atomic or sub-angstrom scale, as the piezoelectric ceramic drive is typically positioned at the back end of the shaft, restricting electron beam incidence along the low index crystal face.
Innovation Solution
A double-axis tilt in-situ mechanical sample holder utilizing a piezoelectric ceramic drive system with a bilaterally symmetric U-shaped tilt stage and a linear stepping motor, allowing precise control of drive displacement and enabling tilt rotation around two axes, integrated with a sample loading stage formed by bulk silicon etching technology for precise uniaxial force application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If piezoelectric ceramic drive is positioned at the back end of the shaft, then accurate control of deformation is achieved, but the function of tilt of the sample holder in the direction of Y axis is limited
Solution Approach 1:
The drive system is segmented into two independent parts: piezoelectric ceramic for precise deformation control along the shaft axis, and linear stepping motor for tilt rotation control. This segmentation allows each component to specialize in its optimal function without interfering with the other.
Solution Approach 2:
The sample holder is designed with multi-functionality to perform both precise deformation control (via piezoelectric ceramic) and dual-axis tilt rotation (via linear stepping motor), making it adaptable for various observation angles and deformation measurements in TEM studies.
2Ease of operation
If piezoelectric ceramic is located at the back end of the shaft, then experimental convenience is achieved, but clear electron diffraction patterns and high resolution images in atomic scale or sub angstrom scale cannot be obtained
Solution Approach 1:
The invention adds a new dimension of motion by introducing tilt rotation capability around the shaft axis, allowing the sample holder to orient crystal faces perpendicular to the electron beam direction, thereby achieving high-resolution imaging and clear diffraction patterns while maintaining the convenience of piezoelectric drive for deformation control.
3Force
If large drive force is applied for tensile testing, then samples with large size and high elastic modulus can be driven, but the deformation mechanism study becomes more complex
Solution Approach 1:
The invention replaces traditional mechanical drive systems with piezoelectric ceramic drive, which provides large drive force through electro-mechanical conversion. This substitution enables the system to handle samples with large size and high elastic modulus while maintaining precise control and simplifying the study of deformation mechanisms through direct electrical control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise in-situ tensile testing at the atomic lattice resolution with large drive force, allowing for comprehensive microstructure observation and high-quality electron diffraction patterns, while maintaining precise control over mechanical properties and deformation mechanisms.
Implementation Method 1
piezoelectric ceramic with three-dimensional drive and high-precision is placed at the through hole of the sample holder shaft to realize the stretch and compression of the samples
Implementation Method 2
a linear stepping motor, disposed at the back end of the sample holder shaft, is connected with the tilt stage
Data Source
AI summary
A double-tilt in-situ mechanical sample holder for TEM based on piezoelectric ceramic drive belongs to the field of material microstructure-mechanical properties in-situ characterization, and it comprise two parts of sample holder shaft body and piezoelectric ceramic drive system. The sample holder shaft body comprise tilt stage, sample holder, linear stepping motor, drive rod, drive linkage. The piezoelectric ceramic drive system comprise piezoelectric ceramic loading stage, piezoelectric ceramic, connecting base and the sample loading stage realizing stretch or compression function. The double-axis tilt of the samples in X and Y axis directions is realized by the reciprocating motion back and forth of the drive rod driven by the linear stepping motor. The stretch or compression of the samples is realized by applying voltage on the piezoelectric ceramic to generate displacement and push the sample loading stage by the connecting base. The invention coordinating with high resolution TEM realizes the observation of the microstructure in atomic and even sub angstrom scales, and at the same time it ensures the controllable deformation of nanomaterials, further realizes the integrative research on the material microstructure-mechanical properties and reveals the deformation mechanism of the materials.