Dual-Actuator Imprint Template Positioning for Lithography
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Solution Overview
Problem
In imprint lithography, existing technologies face challenges in accurately and consistently applying patterns due to limitations in the movement and deformation of imprint templates, particularly in compensating for thermal expansion and magnification errors, which can lead to inaccuracies and inefficiencies in feature size reduction and pattern density on substrates.
Innovation Solution
The proposed solution involves a dual-actuator arrangement where a first actuator with a shorter range of motion, such as a piezoelectric or voice coil actuator, is used for precise control and positioning, while a second actuator with a greater range of motion, like a pneumatic or screw thread actuator, applies larger forces for deformation and correction, allowing for both accurate and extensive movement of the imprint template.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single actuator with short range of motion is used for precise positioning, then positioning precision is improved, but the ability to apply large forces for deformation is limited
Solution Approach 1:
The patent combines two actuators with different range of motion characteristics into a single integrated system. The first actuator (shorter range) provides precise positioning control, while the second actuator (longer range) enables large deformations and force application. This merging allows the system to simultaneously achieve both high precision positioning and substantial force application that would be impossible with a single actuator type.
2Length of moving object
If a single actuator with long range of motion is used for large deformation, then deformation capability is improved, but positioning precision deteriorates
Solution Approach 1:
The actuation system is segmented into two distinct actuators, each optimized for a specific function. The first actuator handles fine-positioning tasks with high precision but limited range, while the second actuator handles coarse-adjustment and large-deformation tasks with extensive range but lower precision. This segmentation allows each component to excel at its designated function without compromising the other.
3Device complexity
If only one type of actuator is used, then device complexity is reduced, but the ability to compensate for both thermal expansion and magnification errors is limited
Solution Approach 1:
The dual-actuator system provides multi-functionality by enabling the imprint template to perform multiple operations: precise positioning adjustments for alignment, large-scale deformations for magnification correction, and thermal expansion compensation. This universal capability allows a single system to handle diverse compensation requirements that would otherwise require multiple separate mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This dual-actuator approach enables precise control over the imprint template's position and deformation, overcoming the limitations of single-actuator systems by combining high force application with precise positioning, thus improving the accuracy and efficiency of pattern transfer in imprint lithography.
Implementation Method 1
a first actuator with a shorter range of motion, such as a piezoelectric or voice coil actuator, is used for precise control and positioning
Implementation Method 2
a second actuator with a greater range of motion, like a pneumatic or screw thread actuator, applies larger forces for deformation and correction
Data Source
AI summary
An arrangement suitable for use in an imprint lithography apparatus is disclosed. The arrangement includes a support structure arranged to support an imprint template arrangement, a first actuator configured to apply a force to the imprint template arrangement, and a second actuator attached to the support structure, and arranged in use to extend between the support structure and the imprint template arrangement, the second actuator configured to apply a force to the imprint template arrangement, a range of movement of the second actuator being greater than a range of movement of the first actuator.