Dual-Axis Micromechanical Actuator Using Merged Magnetic Fields
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Solution Overview
Problem
Current micromirror systems in laser scanners require complex designs with large space requirements and high technical complexity to achieve tilting in two perpendicular directions, which is inefficient for miniaturized applications like mobile projectors.
Innovation Solution
A micromechanical actuator device with a tilting mechanism using a combination of permanent magnets and electromagnets to generate Lorentz forces and magnetic fields, allowing the actuator element to tilt about two axes with high torque generation, reducing space requirements and complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If two micromirrors connected in succession are used to achieve tilting in two perpendicular directions, then the laser beam can be pivotable in two dimensions, but the device complexity and space requirements increase significantly
Solution Approach 1:
The patent merges two separate micromirror systems into a single micromirror that can tilt about two perpendicular axes. The actuator element is connected to the retaining device via a first spring device allowing tilting about a first axis, while the retaining device itself tilts about a second axis relative to the frame device. This integration reduces system complexity while maintaining dual-axis tilting capability.
Solution Approach 2:
The single actuator element serves multiple functions by being capable of tilting about two different axes. The actuator element can be tilted about the first tilting axis relative to the retaining device, and the retaining device can be tilted about the second tilting axis relative to the frame device, enabling one component to perform what previously required two separate components.
2Adaptability or versatility
If two micromirrors connected in succession are used to achieve tilting in two perpendicular directions, then the laser beam can be pivotable in two dimensions, but the space requirements increase
Solution Approach 1:
The patent combines two separate micromirror systems into one integrated structure, reducing the overall MEMS chip surface area. The actuator element and retaining device are arranged such that dual-axis tilting is achieved within a compact footprint, minimizing the space required on the stationary substrate.
Solution Approach 2:
The patent employs a nested arrangement where the actuator element is positioned within the retaining device structure, and the retaining device is positioned within the frame device structure. This nesting allows the tilting mechanisms to be compactly arranged, reducing the overall area required on the MEMS chip while maintaining full dual-axis functionality.
3Adaptability or versatility
If conventional micromirror systems are used, then tilting in two directions is achieved, but the manufacturing technical complexity increases
Solution Approach 1:
The patent integrates two tilting mechanisms into a single manufacturable structure. The actuator element, retaining device, and frame device are designed to be manufactured as an integrated assembly, reducing the number of separate components and assembly steps required compared to using two separate micromirrors.
Solution Approach 2:
The patent segments the tilting functionality into two independent rotational degrees of freedom that can be manufactured separately and then integrated. The first spring device and second spring device provide independent tilting capabilities about different axes, allowing for modular manufacturing and assembly while achieving complex dual-axis functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables miniaturization of the MEMS chip surface area, reduces power consumption, and increases the number of actuator devices per wafer, while providing high mechanical overload resistance and robustness, suitable for thin mobile device housings.
Implementation Method 1
the permanent magnet device being designed for generating a first magnetic field in such a way that when an electrical current is conducted through the electrical conduction device, a Lorentz force is generatable within the first magnetic field, via which the tilting device, in particular the actuator element, is tiltable about the first tilting axis
Implementation Method 2
an electromagnet device that is designed for generating a second magnetic field which acts on the permanent magnet device in such a way that the retaining device is tiltable about the second tilting axis with respect to the frame device
Data Source
AI summary
An actuator device and a method for tilting an actuator device. The method includes the steps: conducting electrical current through an electrical conduction device, which is guided via a tilting device of the actuator device, within a first magnetic field that is generated by a permanent magnet device of the actuator device, so that an actuator element of the tilting device is tilted along a first tilting axis as the result of a Lorentz force; and generating a second magnetic field by an electromagnet device of the actuator device in the area of the permanent magnet device, so that the tilting device is tilted along a second tilting axis as the result of magnetic attraction and repulsion.