Dual Axis Rate Sensor with Coupled Proof Masses

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Solution Overview

Problem

Current angular rate sensors for automotive applications require two separate gyroscopes and ASICs, leading to increased size, cost, and complexity due to the need for dual sensing and drive control circuits.

Innovation Solution

A dual-axis angular rate sensor design featuring coupled masses for torsional drive mode oscillation and Coriolis force-induced rotation detection, utilizing a single ASIC and package to measure rotation about two orthogonal axes, with independent suspension members to minimize dynamic coupling and parasitic resonant modes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If two separate rate sensors are used to measure rotation about two orthogonal axes, then measurement capability is improved, but device complexity and cost increase

Engineering Contradiction:
Improveangular rate measurement capabilityVSAvoidnumber of sensors and ASICs
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines two separate rate sensing functions into a single integrated device. Two proof masses are coupled together through torsion beams to form a unified mechanical structure that senses rotation about two orthogonal axes simultaneously. The drive control circuit and sensing circuit are integrated to control both masses with a single ASIC, merging previously separate functions into one cohesive system.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single rate sensor device performs multiple functions by measuring angular rate about two different orthogonal axes. The coupled proof masses are designed to respond to rotation about both axes, with each mass detecting Coriolis forces from rotation about the other axis, enabling one device to replace two separate sensors.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If two separate rate sensors with separate packages are used, then measurement redundancy is improved, but packaging size and cost increase

Engineering Contradiction:
Improvemeasurement redundancyVSAvoidpackage size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent integrates two previously separate packaged sensors into a single package. The coupled proof masses share common suspension elements and are housed together in one package, eliminating the need for two separate packages while maintaining the redundancy needed for measuring two orthogonal axes.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If two separate ASICs are used for drive control and sensing, then control precision is improved, but manufacturing cost and complexity increase

Engineering Contradiction:
Improvedrive control precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent integrates the drive control and sensing functions for both proof masses into a single ASIC. This consolidated approach reduces manufacturing complexity and cost compared to using two separate ASICs, while the ASIC maintains the precision needed to control and sense from both coupled masses.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces the number of required ASICs and packages, lowering costs and complexity while enhancing mechanical response and reducing failure modes, allowing for efficient detection of angular rates with improved packaging and reduced cross-axis sensitivity.

Implementation Method 1

The first mass is mounted for oscillation about the second axis in response to Coriolis forces produced by rotation about the first axis

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 2

the second mass is mounted for oscillation about the first axis in response to Coriolis forces produced by rotation about the second axis

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 3

first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to the first and second axes

Methodology Applied
Scientific EffectTorsional oscillation:

Data Source

PatentUS7461552B2Dual axis rate sensor
Publication Date: 2008.12.09 EMCORE CORP
  • US7461552B2 patent drawing
  • US7461552B2 patent drawing
  • US7461552B2 patent drawing

AI summary

Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to the first and second axes. The first mass is mounted for oscillation about the second axis in response to Coriolis forces produced by rotation about the first axis, and the second mass is mounted for oscillation about the first axis in response to Coriolis forces produced by rotation about the second axis. In some disclosed embodiments, the rate sensor also includes a pair of accelerometer masses which are connected together for torsional movement of equal amplitude and opposite phase about axes parallel to the third axes in response to acceleration along the second axis and for torsional movement of equal amplitude and opposite phase about axes parallel to the second axis in response to acceleration along the third axes.