Patterned sacrificial layers and porous SIPOS capping create clean cavities, eliminating vent hole etching and reducing contamination risks.
Separate damping elements optimize accelerometer and gyroscope vibration isolation, reducing noise while maintaining sensitivity.
Dynamic sensor activation reduces power consumption while maintaining precise measurement of external shocks on portable devices.
Nested X and Y subcomponents within Z proof mass perimeters maintain symmetry to lower stress sensitivity.
Cutouts in the outer support structure reduce circumferential stiffness to minimize radial hoop stresses caused by differential thermal expansion.
Pulsed thermal actuators generate high force to overcome stiction without user intervention.
A sensor system combines an accelerometer and magnetometer to detect free-fall events.
Active protective garment deploys airbags via sensor logic.
An inertial measurement assembly tracks ore displacement during blasting, eliminating complex pre- and post-blast surveys.
A signal processing device uses correction circuitry to adjust detection signals from multiple inertial sensor axes.
A measuring marker calculates position and posture data to transmit spatial coordinates directly to a surveying instrument.
A fall detection method uses differential air pressure signals from a wearable device and a fixed building sensor to identify user falls.
A MEMS diaphragm forms a chamber using an etching stop layer and structural dielectric layers on a perforated back-plate substrate.
Compliant glass layers insulate thick metallization leads, preventing cracks from thermal expansion mismatch while maintaining electrical performance.
A rotating weight detection device aligns its gravity center with a support beam to concentrate inertial forces and increase stress for accurate measurement.
Anti-phase proof mass movement reduces mechanical stress on moving parts while improving measurement precision.
Trigonometric inversion of periodic sensor signals mitigates drift errors caused by spring constant variations, improving measurement reliability.
An accelerometer merges MEMS sensing with ASIC processing to compute root-mean-square acceleration values directly on the chip.
Interconnected planar spring patterns detect multi-axis acceleration through capacitance changes, resolving vertical structure precision issues.
A flexible dielectric impact sensor uses printed electrodes to detect deformation and measure capacitance changes.
An accelerometer establishes an acceleration signature to detect antenna repositioning and maintain location tracking accuracy.
A self-compensating accelerometer uses multiple resonant modes and neural networks to generate acceleration measurements.
LiTCEM algorithm compensates piezoelectric hysteresis and drift to calculate precise plantar pressure parameters.
A motion sensor uses a pendulum and two accelerometers to isolate linear acceleration from tilt signals.
A calibration circuit transforms multi-dimensional sensor outputs into body coordinates using a pre-calculated matrix.
Corrugated mechanical beams guide modulated optical signals to induce precise vibration frequencies.
Processing force waveforms derives center of mass acceleration from peak and valley levels, eliminating IMU sensor errors during walking.
Sealed inertial sensors in the brake handle detect movement to eliminate mechanical wear and reduce repair frequency.
Bending springs synchronize seismic masses in a sealed MEMS cavity, reducing thermal sensitivity and quadrature errors.
Active drive oscillation reduction prevents particle generation during impact, protecting the MEMS core from electrical shorts and noise.
Segmented sensors calculate differential acceleration to detect traumatic brain injury risks without increasing device complexity.
Medical apparatus detects impacts using acceleration and piezoelectric sensors to generate impact profiles, resolving reliability complexity trade-offs.
Integrated coupled proof masses detect rotation about two orthogonal axes via Coriolis forces, reducing device complexity and cost compared to separate sensors.
A redundant sensor system uses frequency-orthogonal stimulus signals to separate measurement data from test excitation without limiting bandwidth.
A single MEMS structural member acts as both a current-carrying element and proof mass to detect magnetic fields and acceleration simultaneously.
Matched forward and feedback multipliers cancel differential phase shift, improving angular rate measurement accuracy in MEMS gyroscopes.
A MEMS spring mass configuration uses a rigid element and tuned springs to stabilize rotating structures.
A triaxial acceleration sensor uses a rocker mass and z spring to detect spatial accelerations.
Asymmetric perforations in a MEMS teeter-totter mobile mass balance radiometric forces, eliminating offset deviations from temperature gradients.
A single acceleration sensor extracts step cycle-specific characteristic accelerations to calculate walking progress metrics.
Segmented projections on driving masses prevent adhesion and absorb shock impacts while maintaining designed oscillation amplitudes.
A capacitance-based acceleration sensor circuit applies a sinusoidal AC signal to extract the corresponding frequency component using an arithmetic circuit.
A MEMS sensor uses driving combs to oscillate a proof mass for simultaneous rotation and acceleration detection.
A micromechanical spiral spring integrates damping devices at folding section connecting bars to suppress unwanted oscillations.
A semiconductor acceleration sensor uses a rod-shaped weight portion passing through the frame center to position movable electrodes near the axis.
Segmented masses with distinct spring constants maintain sensitivity when the drive frequency differs from the sense resonance.
A monolithic inertial device uses time domain digital triggers to measure rotation and acceleration across multiple axes on a single substrate.
Accelerometers embedded in the fly rod capture casting motion data, replacing expensive external instructors with real-time feedback.
A conductive spring maintains electrical contact within an acceleration sensor assembly.