Dual Electron Beam Conductor Defect Detection
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Solution Overview
Problem
Modern manufacturing processes face challenges in detecting discontinuities in conductors, which are difficult to identify due to their small size and require lengthy inspection sequences, necessitating a fast and reliable method to evaluate conductivity.
Innovation Solution
A method and system using dual electron beams to charge and detect emitted electrons from specific areas of conductors, processing signals to determine electrical coupling, charging rates, and locate discontinuities, even when most of the conductor is buried under an isolating layer or part of a three-dimensional NAND flash memory array.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional inspection methods are used to detect discontinuities in conductors, then detection reliability may be improved, but inspection time increases significantly
Solution Approach 1:
The patent replaces conventional mechanical/optical inspection systems with an electron beam-based detection system. The electron beam interacts with the conductor to generate signals that reveal discontinuities, enabling rapid detection without the time-consuming sequential scanning of traditional methods
Solution Approach 2:
The invention changes the detection parameter from optical/mechanical interaction to electron beam interaction. By using electron beams with specific energies and detecting resulting signals (such as secondary electrons or X-rays), the system achieves both high reliability and fast inspection speed
2Measurement precision
If the entire conductor is inspected to detect small discontinuities, then detection completeness improves, but inspection time increases
Solution Approach 1:
The patent divides the conductor into multiple segments or regions that can be inspected simultaneously or in rapid succession. The electron beam system can target specific segments or scan multiple areas in parallel, reducing the overall inspection time while maintaining complete coverage
Solution Approach 2:
The invention uses an electron beam with sufficient energy and intensity to detect even the smallest discontinuities throughout the conductor. The beam parameters are optimized to ensure that partial inspection of high-risk areas provides adequate detection capability without requiring exhaustive scanning of every portion
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and accurate detection of conductor defects and discontinuities, providing information on conductivity and location of issues within the conductor, improving manufacturing efficiency.
Implementation Method 1
illuminating by a first electron beam a first area of a conductor thereby charging the first area
Implementation Method 2
illuminating by a second electron beam a second area of the conductor
Implementation Method 3
detecting, by a detector, detected emitted electrons that were emitted substantially from the second area
Data Source
AI summary
A system and a method for evaluating a conductor, the method may include: illuminating a first area of a conductor by a first electron beam thereby charging the first area; illuminating by a second electron beam a second area of the conductor; and wherein an aggregate size of the first and second areas is a fraction of an overall size of the conductor; detecting, by a detector, detected emitted electrons that were emitted substantially from the second area and generating detection signals indicative of the detected emitted electrons; and processing, by a processor, the detection signals to provide information about a conductivity of the conductor.