Dual-Element Gas Sensor With Half-Bridge Temperature Compensation

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Solution Overview

Problem

Existing sensors using MEMS elements face challenges in improving their characteristics, particularly in terms of sensitivity and stability in detecting specific elements in varying atmospheric conditions.

Innovation Solution

A sensor design featuring dual detection element portions with resistance members and conductive members, where one element is heated to detect changes in resistance due to the presence or concentration of specific elements, while the other remains stable, allowing for higher sensitivity and accuracy by suppressing ambient temperature influences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single detection element is used, then the device complexity is low, but the measurement precision and stability are insufficient due to ambient temperature influences

Engineering Contradiction:
Improvedetection precisionVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detection element is divided into two separate portions: a first detection element portion with a first resistance member and a second detection element portion with a second resistance member. Each portion can be independently configured and connected to form a bridge circuit, allowing separate optimization for temperature compensation and detection functions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the operational parameters by heating the first detection element portion to a elevated temperature while keeping the second detection element portion at ambient temperature. This temperature parameter differentiation enables the heated portion to detect target gases while the unheated portion compensates for temperature drift effects.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the detection element is heated to improve sensitivity, then the detection precision improves, but the energy consumption increases and stability decreases due to temperature drift

Engineering Contradiction:
Improvedetection sensitivityVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The detection system is segmented into two portions with different thermal states: one heated for enhanced sensitivity and one unheated for energy efficiency and temperature reference. This segmentation allows the system to achieve high detection sensitivity without requiring the entire system to consume high energy continuously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies parameter changes by selectively heating only the first detection element portion while maintaining the second portion at ambient temperature. This selective parameter modification optimizes energy consumption by limiting thermal energy input to only where needed for enhanced detection sensitivity.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the detection element is heated to suppress ambient temperature influences, then the stability improves, but the energy consumption increases

Engineering Contradiction:
Improvedetection stabilityVSAvoidheating energy
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent segments the detection function between two portions: the first portion is heated to provide temperature stability and suppress ambient temperature influences on detection, while the second portion remains unheated to provide a temperature reference and compensate for drift without requiring continuous heating energy.

Inventive Principle:
Principle #1Segmentation

4Measurement precision

If dual detection element portions are used, then the measurement precision and stability improve, but the device complexity increases

Engineering Contradiction:
Improvedetection accuracyVSAvoidcircuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detection system is divided into two functional segments that are connected in a bridge configuration. This segmentation allows independent optimization of each portion while the bridge circuit structure provides a systematic way to combine them, improving measurement precision through differential measurement without requiring complex additional components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent merges the two detection element portions into a unified bridge circuit structure where the first and second resistance members are connected with resistive members to form complete circuits. This merging combines the advantages of both heated and unheated detection portions into a single integrated system that achieves high accuracy without proportionally increasing complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor achieves enhanced sensitivity and stability in detecting elements like hydrogen, carbon dioxide, and methane by utilizing a half-bridge circuit structure, enabling precise detection of concentration changes and reducing the impact of ambient temperature variations.

Implementation Method 1

one element is heated to detect changes in resistance due to the presence or concentration of specific elements

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

detect changes in resistance

Methodology Applied
Scientific EffectElectrical resistance: Electrical Resistance

Implementation Method 3

utilizing a half-bridge circuit structure, enabling precise detection of concentration changes

Methodology Applied
Scientific EffectElectrical resistance measurement: Electrical Resistance

Data Source

PatentUS20250289710A1sensor
Publication Date: 2025.09.18 KK TOSHIBA
  • US20250289710A1 patent drawing
  • US20250289710A1 patent drawing
  • US20250289710A1 patent drawing

AI summary

According to one embodiment, a sensor includes a base, first and second detection element portions, first to third resistor terminals, and first and second conductive terminals. The base includes first and second base regions. The first detection element portion is provided at the first base region. The first detection element portion includes a first detection element. The first detection element includes a first resistance member and a first conductive member. The first resistance member includes a first resistance portion and other portion. The first conductive member includes a first conductive portion and other portion. The second detection element portion is provided at the second base region. The second detection element portion includes a second detection element. The second detection element includes a second resistance member and a second conductive member. The second resistance member includes a second resistance portion and other portion. The second conductive member includes a second conductive portion and other portion.