Independent Dual-Hand End Effector for FOUP Substrate Conveying
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Solution Overview
Problem
Conventional batch conveying type hands face difficulties in accessing substrates stored in FOUP due to space constraints, making it impossible to insert the hand base portion and access the lower end region, thereby restricting their use in substrate conveying.
Innovation Solution
The implementation of an end effector with independently drivable first and second hands, where the first hand can insert between vertically adjacent substrates and hold them above or below, and the second hand can advance below or above the substrates, with adjustable substrate supporting portions to accommodate different substrate heights and pitches, allowing for simultaneous conveying without requiring additional space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a batch conveying type hand is used to hold multiple substrates simultaneously, then substrate conveying efficiency is improved, but the hand base portion cannot be inserted into FOUP due to space constraints
Solution Approach 1:
The end effector is divided into two independent hands: a first hand for single substrate conveyance and a second hand for batch substrate conveyance. This segmentation allows each hand to be optimized for its specific function, with the second hand designed to convey multiple substrates simultaneously without requiring insertion into FOUP, thus resolving the contradiction between conveying efficiency and accessibility.
Solution Approach 2:
The second hand is positioned to approach substrates from a direction that does not require insertion into FOUP, utilizing spatial arrangement to avoid the space constraint problem. By conveying substrates from above or below without inserting the hand base portion into FOUP, the system maintains both batch conveying capability and accessibility.
2Productivity
If the hand base portion advances below substrates for batch conveying, then multiple substrates can be held simultaneously, but space for insertion is not available in standard FOUP
Solution Approach 1:
The system separates batch conveying function from single substrate conveying function into two distinct hands. The second hand is specifically designed for batch conveying by positioning substrate holding means below substrates, while the first hand handles single substrate tasks, allowing the system to achieve batch conveying without requiring the entire end effector to fit within FOUP constraints.
Solution Approach 2:
The robot arm serves as an intermediary that positions the second hand to convey substrates from above or below FOUP without requiring the hand base portion to be inserted into FOUP. This intermediary positioning mechanism enables batch conveying while respecting the volume constraints of standard FOUP.
3Productivity
If substrate holding means is positioned below lowermost substrate for batch conveying, then two or more substrates including lowermost can be held, but access to lower end region of FOUP is blocked
Solution Approach 1:
The system uses two independent hands with different functions: the first hand accesses the lower end region of FOUP for single substrate conveyance, while the second hand positions itself to hold multiple substrates including the lowermost one without requiring access to the lower end region. This segmentation resolves the contradiction between batch holding capability and access to lower regions.
Solution Approach 2:
Instead of inserting the hand base portion into FOUP from below to access the lower end region, the second hand approaches from above and positions substrate holding means below substrates to achieve batch conveying. This inverted approach allows batch holding without blocking access to the lower end region, as the first hand can still access that region independently.
Data Source
Figure 1~2
Figure 3~4
Figure 5A~5B
AI summary
The end effector (5) has a first hand (8) and a second hand (9) which can be driven independently from each other. The first hand (8) has a hand body (10) which can be inserted between vertically adjacent substrates stored in a substrate storing portion, holding a substrate (S) immediately above or immediately below the hand body (10). The second hand (9) has a hand base portion (11) which at least partially advances below a lowermost substrate (S) or above an uppermost substrate (S) of a plurality of substrates (S) stored in a substrate storing portion and a substrate holding means (12) provided to the hand base portion (11) so as to hold two or more substrates (S) including the lowermost substrate (S) or the uppermost substrate (S). By the end effector (5), substrates can be conveyed without any problem even when use of a batch conveying type hand is restricted due to the condition on the substrate storing portion side.