Dual-Pass Particle Detection for Low-Signal 10 nm Sizing

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Solution Overview

Problem

Existing optical particle counters struggle to accurately detect and characterize small particles below 20 nm in size due to low signal-to-noise ratios, requiring increased complexity and cost, and frequent calibration.

Innovation Solution

A dual-pass or multi-pass particle detection system utilizing interferometric techniques with coherent light beams, including a reflecting surface to amplify the interrogation beam and separate scattered light components for enhanced signal detection, combined with optical isolators and acousto-optic modulators to improve signal-to-noise ratio.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional optical particle counters are used to detect small particles, then the detection capability is limited, but increasing laser power and using shorter wavelengths increases device complexity and cost

Engineering Contradiction:
Improveparticle detection capabilityVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detection system is divided into multiple independent optical paths (first and second detection paths) that process different components of scattered light separately. Each path uses a dedicated photodetector to measure specific scattering characteristics, enabling precise particle detection without requiring excessive laser power or complex single-path optics

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A beam splitter is introduced as an intermediary optical element to separate the scattered light into different paths. This allows the system to analyze multiple scattering components simultaneously using simple, well-established optical components rather than requiring a single complex detection path with high laser power

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If conventional optical particle counters are used to detect small particles, then the detection capability is limited, but using more complex techniques like condensation nuclei counting increases cost

Engineering Contradiction:
Improveparticle detection capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The scattered light is segmented into different detection paths based on scattering angle and intensity characteristics. Each path uses standard optical components (beam splitter, photodetectors) rather than requiring complex condensation nuclei counting equipment, achieving high precision detection at lower manufacturing cost

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system uses universal optical components (beam splitters, photodetectors, lasers) that can detect particles across different size ranges and scattering conditions. This multi-functional approach replaces specialized techniques like condensation nuclei counting with a versatile interferometric scattering system

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If conventional optical particle counters are used, then the signal to noise ratio is low, but increasing laser power decreases reliability due to frequent calibration and maintenance

Engineering Contradiction:
Improvesignal to noise ratioVSAvoidcalibration frequency
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The scattered light signal is segmented into multiple detection paths that measure different scattering components. This segmentation allows the system to extract particle information from multiple independent measurements, improving signal-to-noise ratio through signal integration while using moderate laser power that does not require frequent calibration

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system measures more scattering components than a single-path system (both s-polarized and p-polarized light components through the beam splitter), providing excess measurement information that can be processed to improve signal-to-noise ratio while maintaining reliable operation at standard laser powers

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system significantly enhances the detection of small particles by increasing the signal-to-noise ratio, allowing for accurate counting and sizing of particles as small as 10 nm with reduced false counts and faster statistical assessment.

Implementation Method 1

a light source providing a source beam of electromagnetic radiation

Methodology Applied
Scientific EffectCoherent light: Coherent Light

Implementation Method 2

a first beam splitter configured to split the source beam into an interrogation beam and a reference beam

Methodology Applied
Scientific EffectBeam splitting:

Implementation Method 3

a reflecting surface configured to reflect the interrogation beam back on itself to produce an amplified beam intersecting the particle interrogation zone

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

a side scattered beam produced via one or more particles interacting with the interrogation beam in the particle interrogation zone

Methodology Applied
Scientific EffectLight scattering: Scattering

Implementation Method 5

a first photodetector configured to detect the first component beam, and a second photodetector configured to detect the second component beam

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Implementation Method 6

The second beam splitter may be configured to: (i) receive the reference beam and a side scattered beam produced via one or more particles interacting with the interrogation beam in the particle interrogation zone; and (ii) produce a first component beam and second component beam

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS20250334502A1Enhanced dual-pass and multi-pass particle detection
Publication Date: 2025.10.30 PARTICLE MEASURING SYSTEMS INC
  • US20250334502A1 patent drawing
  • US20250334502A1 patent drawing
  • US20250334502A1 patent drawing

AI summary

A particle detection system may include a light source, a first beam splitter, a particle interrogation zone, a reflecting surface, a second beam splitter, a first photodetector, and a second photodetector. The first beam splitter may be configured to split the source beam into an interrogation beam and a reference beam. The particle interrogation zone may be disposed in the path of the interrogation beam. The reflecting surface may be configured to reflect the interrogation beam back on itself. The second beam splitter may be configured to: (i) receive the reference beam and side scattered light from one or more particles interacting with the interrogation beam in the particle interrogation zone; and (ii) produce a first component beam and second component beam. The first photodetector may be configured to detect the first component beam. The second photodetector may be configured to detect the second component beam.