Dual-Plasma Optical Gas Analysis Across a Wide Pressure Range
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Solution Overview
Problem
Existing plasma generation instruments require multiple devices to cover a wide pressure range, leading to high costs, space, and energy consumption, as they are designed for specific pressure ranges rather than a broad spectrum from high vacuum to normal pressure.
Innovation Solution
A device with integrated first and second plasma sources, capable of generating plasma across a wide pressure range from 10−8 Torr to 1500 Torr, using a single flange connection and a single optical sensor, by combining glow discharge and silent discharge sources in separate chambers with shared optical connections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple plasma-generating instruments are used to cover a wide pressure range, then plasma generation stability is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple plasma sources (glow discharge source for vacuum range and silent discharge source for atmospheric pressure range) into a single integrated device with shared optical components, eliminating the need for multiple separate instruments while maintaining plasma generation stability across the full pressure range
Solution Approach 2:
The device is designed to perform multiple functions using a single instrument: it can generate plasma in both vacuum conditions (10^-8 to 10^-3 Torr) and atmospheric pressure conditions (10^2 to 10^3 Torr), and can switch between different plasma sources depending on the pressure range, making it a universal plasma generation system
2Reliability
If multiple plasma-generating instruments are used to cover a wide pressure range, then plasma generation stability is improved, but space requirements increase
Solution Approach 1:
The patent combines multiple plasma sources (glow discharge source for vacuum range and silent discharge source for atmospheric pressure range) into a single integrated device with shared optical components, eliminating the need for multiple separate instruments while maintaining plasma generation stability across the full pressure range
3Reliability
If multiple plasma-generating instruments are used to cover a wide pressure range, then plasma generation stability is improved, but energy consumption increases
Solution Approach 1:
The device dynamically selects and switches between different plasma sources based on the operating pressure range: using the glow discharge source for vacuum conditions and the silent discharge source for atmospheric pressure conditions, optimizing energy consumption for each specific operating condition rather than running multiple instruments continuously
4Reliability
If multiple plasma-generating instruments are used to cover a wide pressure range, then plasma generation stability is improved, but operational complexity increases
Solution Approach 1:
The device dynamically selects and switches between different plasma sources based on the operating pressure range: using the glow discharge source for vacuum conditions and the silent discharge source for atmospheric pressure conditions, optimizing energy consumption for each specific operating condition rather than running multiple instruments continuously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable plasma generation and emission light across a wide pressure range with minimal space and resources, allowing efficient optical gas analysis and detection with enhanced sensitivity and reduced complexity.
Implementation Method 1
a first plasma source, wherein the first plasma source is arranged in a first discharge chamber and is adapted to generate a first plasma in a low-pressure range
Implementation Method 2
The method is based on the fact that excited atoms emit electromagnetic radiation characteristic of the chemical element
Implementation Method 3
excited atoms emit electromagnetic radiation characteristic of the chemical element and thus provide information about the composition of the sample
Implementation Method 4
a second plasma source, wherein the second plasma source is arranged in a second discharge chamber and is adapted to generate a second plasma in a high-pressure range
Implementation Method 5
The excitation of the atoms is achieved, for example, by converting the sample to the plasma state
Data Source
AI summary
The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source (1) in a first discharge chamber (2) in order to generate a first plasma in a low-pressure range, a second plasma source (3) in a second discharge chamber (4) in order to generate a second plasma in a high-pressure range, a first coupling element (5) for coupling the device to a system, in order to guide gas out of the system, and a second coupling element (6) for coupling the device to an optical sensor (12). The first discharge chamber (2) has a first optical connection with at least one optical lens (7, 8) to the second coupling element (6) and the second discharge chamber (4) has a second optical connection with at least one optical lens (8) to the second coupling element (6). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.