Dual-Substrate X-Ray Detection Panel for Interface Uniformity
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Solution Overview
Problem
Current X-ray digital radiography detection panels face challenges in achieving high imaging quality and resolution due to defects in the light detection layer caused by uneven interfaces, leading to lateral leakage current and reduced yield and performance.
Innovation Solution
The detection panel design separates the light detection layer and drive circuit onto two substrates, allowing for a flat interface formation and reducing defects, while also simplifying the manufacturing process by minimizing the number of photomask processes, thereby improving the photosensitive element's performance and yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the light detection layer and drive circuit are integrated on a single substrate, then the device complexity is reduced, but the interface uniformity deteriorates causing defects and lateral leakage current
Solution Approach 1:
The patent divides the detection panel into two separate substrates: a first substrate containing the light detection layer and a second substrate containing the drive circuit. This segmentation allows each substrate to be optimized independently, ensuring a flat and uniform interface between them while avoiding the defects that would arise from integrating both layers on a single substrate.
2Manufacturing precision
If multiple photomask processes are used to form the light detection layer, then the manufacturing precision is improved, but the productivity decreases due to increased process steps
Solution Approach 1:
The patent separates the formation of the light detection layer on the first substrate from the drive circuit formation on the second substrate. This allows the light detection layer to be formed with high precision using fewer photomask processes, while the drive circuit is formed independently, thereby reducing the total number of sequential process steps and improving overall productivity.
3Manufacturing precision
If the interface between light detection layer and drive circuit is made flat, then the manufacturing precision is improved, but the device complexity increases due to separate substrate assembly
Solution Approach 1:
The patent creates a flat interface by forming the light detection layer on a separate first substrate that can be independently planarized, then assembling it with the second substrate containing the drive circuit. This segmentation enables precise control of interface flatness through dedicated processing on each substrate, while the assembly process is simplified by using standardized bonding techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the flatness of the light detection layer, reduces leakage current, and increases the filling rate and photosensitive area, resulting in improved imaging quality and production efficiency.
Implementation Method 1
a light detection layer configured to convert incident light into electrical signals
Data Source
AI summary
A detection panel and a manufacturing method thereof are disclosed. The detection panel includes a first substrate and a second substrate, and the first substrate includes a light detection layer; the second substrate includes a drive circuit; the first substrate and the second substrate are opposite to each other for cell assembly, and the drive circuit is coupled to the light detection layer to read a photosensitive signal generated by the light detection layer.