Dual Transfer Substrate Processing Apparatus Vertical Load Port Stacking
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Solution Overview
Problem
Current substrate processing apparatuses face limitations in achieving high throughput due to the stagnation of transfer containers at the load port, requiring increased stages which widen the apparatus and lead to inefficient use of space, thus hindering further throughput improvements.
Innovation Solution
The substrate processing apparatus employs a dual transfer system with first and second transfer paths and corresponding load ports at different levels, along with a container storage part, to increase the frequency of transfer container loading and unloading, utilizing an auxiliary and main transfer mechanism to manage the transfer containers between load ports and storage areas efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of stages aligned in the load port is increased to cope with higher throughput requirements, then the throughput is improved, but the width of the apparatus is widened and the installation area is increased
Solution Approach 1:
The patent introduces a vertical dimension by providing multiple load ports at different heights (first load port at lower level, second load port at upper level) instead of only horizontal arrangement. This allows transfer containers to be stacked vertically, increasing the number of stages without proportionally increasing the apparatus width, thereby improving throughput while controlling installation area.
Solution Approach 2:
The patent implements a nested structure where transfer containers are stored in a container storage part that is positioned within the apparatus body, and load ports are arranged at different levels within the same vertical space. This nesting approach maximizes space utilization by placing storage and processing functions in three-dimensional space rather than only horizontal expansion.
2Productivity
If the number of stages aligned in the load port is increased, then the throughput is improved, but the apparatus width is widened
Solution Approach 1:
The patent transitions from a two-dimensional horizontal arrangement of load ports to a three-dimensional arrangement by stacking load ports at different vertical levels. This allows the system to accommodate more transfer container stages without proportionally increasing the apparatus width, as the additional stages are arranged vertically rather than horizontally.
3Productivity
If a single transfer path is used, then the device complexity is reduced, but the throughput is limited due to transfer container stagnation at the load port
Solution Approach 1:
The patent segments the transfer system into multiple independent transfer paths (first transfer path at lower level, second transfer path at upper level) that operate simultaneously. This segmentation allows multiple transfer containers to be processed in parallel without interfering with each other, thereby increasing throughput while keeping each individual transfer path relatively simple in structure.
Solution Approach 2:
The patent introduces a container storage part as an intermediary component between the load ports and the processing chambers. This intermediary storage area acts as a buffer that decouples the loading operations from the processing operations, allowing transfer containers to be staged and prepared without causing stagnation at the load ports, thereby improving throughput without significantly increasing system complexity.
Data Source
AI summary
A substrate processing apparatus, which utilizes a first transfer apparatus and a second transfer apparatus which are configured to transfer a transfer container containing a plurality of substrates, along a first transfer path and a second transfer path whose lateral positions differ from each other, respectively, including a first load port where the transfer container is loaded and unloaded by the first transfer apparatus, and a second load port that is arranged stepwise with respect to the first load port, with the transfer container being loaded to and unloaded from the second load port by the second transfer apparatus.