Dual Wrist Robot Arm for Compact Substrate Transport
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Solution Overview
Problem
Conventional electronic device manufacturing systems face challenges in efficiently and precisely transporting dual substrates between multiple chambers due to the rigidity issues of long robot arms, limited versatility of SCARA robots, and the need for a compact robot design to minimize system size and reduce substrate movement distances.
Innovation Solution
A robot apparatus with a compact configuration featuring an upper arm, forearm, and dual wrist members, each independently controllable, allowing for non-straight-on orientation and entry into chambers with multiple parallel facets, enabling efficient substrate exchange with a minimal number of robotic arms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If conventional long robot arms are used for substrate transport, then the robot can reach distant chambers, but the system size increases and substrate movement distances increase
Solution Approach 1:
The robot arm is divided into multiple segments (upper arm, forearm, wrist members) that can rotate independently about different axes. This segmentation allows the robot to achieve extended reach through coordinated rotation of segments rather than requiring a single long arm, thereby reducing the overall system volume while maintaining the ability to transport substrates between distant chambers.
2Device complexity
If SCARA robot configuration is used, then the robot structure is simplified, but the versatility for non-straight-on chamber entry is limited
Solution Approach 1:
The robot employs multiple rotational joints with independent drive assemblies that allow dynamic adjustment of the arm configuration. The upper arm, forearm, and dual wrist members can rotate about different axes independently, enabling the robot to adapt its orientation for non-straight-on chamber entry while maintaining a relatively simple overall structure through modular joint design.
3Adaptability or versatility
If multiple robotic arms are used for substrate transport, then the versatility and redundancy are improved, but the system complexity and size increase
Solution Approach 1:
The single robot apparatus is designed with dual wrist members and independent rotational capabilities that enable it to perform multiple functions: transporting substrates between different chambers, entering chambers at various orientations, and potentially handling multiple substrates simultaneously. This multi-functionality eliminates the need for multiple separate robotic arms while maintaining versatility.
Data Source
AI summary
Substrate transport systems and robot apparatus are provided. The systems are adapted to pick or place a substrate at a destination by independently rotating an upper arm, a forearm, and dual wrist members relative to each other and a base. Methods of operating the robot apparatus are provided, as are numerous other aspects.