Dynamic Film Coating With Zoned Substrate Spacing Control
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Solution Overview
Problem
Conventional dynamic coating devices face challenges in maintaining a small spacing between adjacent substrates, leading to material waste and process instability due to high acceleration and upper limit speeds, which affect product yield and stability.
Innovation Solution
A dynamic coating device with a control module and detection elements in a transition chamber that adjusts the transmission speed of substrates through multiple chase processes, allowing for controlled spacing reduction between adjacent substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the process speed of substrate is increased to meet high production capacity requirements, then productivity is improved, but the spacing between adjacent substrates increases leading to coating material waste
Solution Approach 1:
The transition chamber is divided into multiple zones (first transition zone, second transition zone, third transition zone) with different drive mechanisms. Each zone independently controls the substrate transmission speed, allowing staged acceleration and deceleration. This segmentation enables precise spacing control (below 20mm) even at high process speeds (4m/min), reducing coating material waste to below 10%.
2Length of moving object
If the upper limit speed of transition chamber is increased to reduce substrate spacing, then spacing control is improved, but substrate fragment rate increases due to high acceleration
Solution Approach 1:
The drive mechanisms in different transition zones have independently adjustable transmission speeds. The system dynamically controls acceleration and deceleration rates by adjusting the speed of each drive mechanism. This dynamic control reduces substrate fragment rate while maintaining small spacing (below 20mm) between adjacent substrates.
Solution Approach 2:
The transmission speed parameter of drive mechanisms is changed across different transition zones. The first drive mechanism operates at a first transmission speed, the second at a second transmission speed, and the third at a third transmission speed. This parameter variation allows controlled spacing reduction without excessive acceleration, reducing substrate fragmentation.
3Productivity
If the transmission speed in transition chamber is increased to achieve chase operation, then productivity is improved, but process stability deteriorates due to wraparound risk
Solution Approach 1:
The control module receives feedback from detection elements about substrate positions and adjusts the transmission speed of drive mechanisms accordingly. This feedback control ensures that substrates are spaced correctly (below 20mm) and enter the coating chamber at the right time, preventing wraparound and maintaining process stability while achieving high productivity.
Data Source
AI summary
A dynamic film coating device and a dynamic film coating method using the same. The dynamic film coating device includes a control module, a buffer chamber, a transition chamber, and a film coating chamber which are sequentially arranged in a first direction, wherein the transition chamber includes at least three detection elements, two adjacent detection elements define one transition section, and a driving mechanism is arranged in the transition section and has a process speed, a transmission speed and a limit speed. The control module is in communication connection with the detection elements and the driving mechanisms, so as to control the driving mechanisms to accelerate to the transmission speed when a tail of a previous substrate moves away from the film coating chamber, and control the driving mechanisms to decelerate to the process speed when a head of a latter substrate leaves.