Dynamic Relative Testing for Integrated Circuit Devices
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Solution Overview
Problem
The semiconductor industry faces challenges in efficiently determining the optimal test recipes for integrated circuit devices, leading to lengthy test programs and throughput limitations due to static test flow and acceptance criteria, which do not adapt to variations in device performance over the product life cycle.
Innovation Solution
A method and apparatus that dynamically determine parameters for integrated circuit devices using a tester, generating relative acceptance criteria to assess each device's pass/fail status, allowing for a tiered testing approach that reduces unnecessary testing by identifying outliers and applying appropriate test programs based on device characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If static test programs with fixed acceptance criteria are used, then test consistency and reproducibility are maintained, but testing throughput is limited and test program length increases
Solution Approach 1:
The patent implements dynamic test programs that automatically adapt acceptance criteria based on measured device parameters. The system calculates relative acceptance criteria by comparing each device's parameters against the measured distribution, allowing the test program to dynamically adjust testing depth and duration based on individual device characteristics, thereby increasing throughput without sacrificing quality.
Solution Approach 2:
The patent changes the acceptance criteria parameters from fixed static values to dynamic relative criteria based on measured device parameters. By calculating acceptance criteria as functions of measured parameters (e.g., threshold voltage, gate leakage), the system optimizes test program length and depth for each device, resolving the contradiction between test consistency and productivity.
2Reliability
If comprehensive test programs are executed for all devices, then device characterization accuracy is improved, but resource utilization decreases and defects are not efficiently identified
Solution Approach 1:
The patent applies local quality by tailoring the testing approach to individual device characteristics. Devices are classified into groups based on their measured parameters, and different testing depths are applied to different groups. This ensures that resources are not wasted on comprehensive testing of all devices, but rather applied selectively where needed, improving reliability while reducing energy consumption.
Solution Approach 2:
The system uses feedback from initial measurements to determine the appropriate testing depth for each device. By measuring key parameters first and using those results to calculate relative acceptance criteria, the system feedback-adjusts the test program accordingly, ensuring accurate characterization only where necessary and avoiding unnecessary resource expenditure on devices that clearly pass or fail.
3Adaptability or versatility
If fixed acceptance criteria are used for all devices, then testing consistency is maintained, but the ability to identify outliers and apply appropriate test programs is reduced
Solution Approach 1:
The patent implements dynamic acceptance criteria that automatically adapt to each device's measured parameters. The system calculates relative acceptance criteria based on the distribution of measured parameters across the device population, allowing the test program to dynamically adjust testing depth and duration. This eliminates the need for manual test program iteration while maintaining consistency through automated calculation.
Data Source
AI summary
A method includes loading a plurality of integrated circuit devices into a tester. At least one parameter is determined for each of the integrated circuit devices using the tester. At least one relative acceptance criterion associated with the parameter is determined based on the determined parameters for the plurality of integrated circuit devices. A pass/fail status of each of the integrated circuit devices is determined using the relative acceptance criterion.