Dynamic Suction Point Control for Substrate Transfer
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Solution Overview
Problem
Typical substrate processing apparatuses often unnecessarily stop the processing process when they fail to suction the center of a substrate due to foreign materials or bending, without considering alternative suction points, leading to reduced productivity.
Innovation Solution
A substrate transfer apparatus with a control system that changes the suction point on the substrate when initial suction attempts are unsuccessful, attempting suction at predefined alternative points around the center, such as radial and orthogonal directions, to increase the chances of successful suction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the robot always attempts to suction the center of the substrate, then the suction operation is simple and quick, but the process stops unnecessarily when foreign materials or bending prevent successful suction at the center
Solution Approach 1:
The suction point is made dynamic rather than fixed at the center. The control part dynamically adjusts the suction point location based on whether suction at the current point is successful, allowing the system to adapt to various substrate conditions and maintain high reliability while preserving productivity
Solution Approach 2:
The suction point position parameter is changed from a fixed center location to a variable location. When suction fails at the center, the control part changes the position parameter to an alternative point and retries, thereby increasing the overall success rate without complicating the basic suction operation
2Device complexity
If the robot re-attempts suction at the same center point multiple times, then the suction operation remains simple, but productivity is reduced due to repeated failed attempts
Solution Approach 1:
The system performs a preliminary attempt at the center point first, and only if that fails does it proceed to alternative points. This preliminary action approach maintains simplicity for normal cases while providing a pathway to handle failures, balancing complexity and productivity
Solution Approach 2:
The control part implements feedback by monitoring whether suction at the current point is successful. Based on this feedback, it decides whether to continue at the same point or move to an alternative point, creating an intelligent control system that improves productivity without excessive complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the likelihood of process interruptions and enhances productivity by increasing the success rate of substrate suction, allowing continuous operation of the substrate processing apparatus.
Implementation Method 1
the suction part suctioning and fixing the substrate... the suction part may use a vacuum pressure to suction the substrate
Data Source
AI summary
Provided are a substrate transfer apparatus and method and a substrate processing apparatus. The substrate transfer apparatus includes: a body portion; an arm part coupled to the body portion, the arm part moving to allow the substrate to be transferred; a suction part provided with the arm portion, the suction part suctioning and fixing the substrate; and a control part controlling an operation of the substrate transfer apparatus, wherein the control part changes a suction point on the substrate to re-attempt suction when suction of the substrate by the suction part is unsuccessful.