E-fuse Test Device for Programming Current Measurement
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Solution Overview
Problem
Existing semiconductor technologies lack an effective method to measure and determine the programming current of e-fuses, which is crucial for programming and testing e-fuse structures in semiconductor devices, leading to uncertainties in programming voltage and current levels.
Innovation Solution
The development of an e-fuse test device comprising a first transistor and a fuse array, along with a second transistor and a second fuse element, configured to detect current passing through the transistors and fuses, allowing for the measurement of programming current by utilizing a fuse array with equal resistance values and voltage levels, enabling accurate determination of programming current for e-fuse structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If no e-fuse test device is used, then the semiconductor device structure remains simple, but the programming current cannot be measured leading to uncertainties in programming voltage and current levels
Solution Approach 1:
The test device is segmented into distinct functional modules: a fuse array with multiple fuse elements arranged in series strings, a transistor for current control, and a detector for measurement. This modular segmentation allows the complex measurement function to be achieved through coordinated simple components, resolving the contradiction between measurement capability and device simplicity.
Solution Approach 2:
A transistor is introduced as an intermediary component between the fuse array and the detector. The transistor acts as a controlled current source that enables precise measurement of programming current by regulating the current flow through the fuse elements, thereby achieving accurate measurement without requiring direct complex measurement circuitry.
2Reliability
If programming current is not accurately determined, then the device structure remains unchanged, but the reliability of e-fuse programming is compromised
Solution Approach 1:
The detector provides feedback information about the current flowing through the fuse array, enabling determination of the programming current level. This feedback mechanism allows for reliable programming by confirming that the appropriate current is being applied, resolving the difficulty of detecting and measuring programming current while improving programming reliability.
Solution Approach 2:
The fuse array is designed with multiple fuse elements connected in series, creating replicated structures that allow current measurement through one element to represent the programming current for similar e-fuse structures in the main device. This copying approach enables reliable current determination without directly measuring the programming current in the actual e-fuse location.
3Manufacturing precision
If programming current levels are uncertain, then no additional measurement components are needed, but the accuracy of semiconductor device manufacturing is reduced
Solution Approach 1:
The test device implements local quality by creating a dedicated measurement region with specific fuse elements and detector configuration, separate from the main e-fuse array. This localized measurement setup provides accurate programming current determination for the specific test location without complicating the overall device structure, as the measurement function is confined to a specific region.
Solution Approach 2:
The test device structure is designed to be universal by using standard transistor and detector components that can measure current through various fuse configurations. The fuse array with multiple series-connected elements can serve both as a test structure and as a model for the actual e-fuse programming, allowing the same measurement approach to be applied universally across different e-fuse implementations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise measurement of programming current, enhancing the reliability of e-fuse programming and reducing the risk of influencing other device structures, thereby improving the reliability and accuracy of semiconductor device manufacturing processes.
Implementation Method 1
configured to detect current passing through the first transistor
Data Source
AI summary
An e-fuse test device is provided. The e-fuse test device may include a first transistor, and a fuse array connected to a source/drain terminal of the first transistor. The fuse array may include n fuse groups, each of the fuse groups may include one end, the other end, and m first fuse elements connected in series to each other between the one end and the other end, the one end of each of the fuse groups may be connected to each other, and the other end of each of the fuse groups may be connected to the source/drain terminal of the first transistor, and the n and m are natural numbers that are equal to or larger than two.