Eccentric Workpiece Carrier for Controlled Rotation in Vacuum Coating
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Solution Overview
Problem
Existing workpiece carrier devices for vacuum processing are complex, with large space requirements due to toothed wheels and ring gears, leading to potential malfunctions and uncontrollable rotation speeds, which can affect the coating quality of workpieces.
Innovation Solution
A simplified workpiece carrier device design featuring a rotary frame with a closed housing and eccentric driving mechanism, allowing for adjustable angular velocity and protection from processing influences, using a planetary gear set to distribute drive components efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If toothed wheels and ring gears are used to drive workpiece carriers and holders, then rotational motion can be transmitted, but the structure becomes complex and space requirements increase
Solution Approach 1:
The patent extracts the drive mechanism from the workpiece carrier device by using an external motor mounted on the vacuum chamber wall rather than integrating gears and toothed wheels within the carrier structure. This eliminates the complex gear train while maintaining reliable rotational transmission through a simpler direct-drive configuration.
Solution Approach 2:
The patent introduces a magnetic coupling or belt transmission as an intermediary between the external motor and the workpiece carrier, eliminating the need for direct mechanical gear engagement. This intermediary mechanism transmits rotational motion without requiring complex toothed wheels and ring gears integrated into the carrier structure.
2Reliability
If toothed wheels and ring gears are used for drive transmission, then rotational motion is achieved, but the device occupies large space
Solution Approach 1:
The drive mechanism is extracted from the interior space of the vacuum chamber by mounting the motor externally on the chamber wall. This removes the bulky gear components from the moving workspace, significantly reducing the volume occupied by drive components while maintaining reliable transmission through the external motor configuration.
3Ease of operation
If toothed wheels and ring gears are exposed to high temperatures and processing materials, then drive function is maintained, but malfunctions and obstructions occur
Solution Approach 1:
The drive mechanism is extracted from the harsh processing environment by mounting the motor externally on the vacuum chamber wall. This isolates the drive components from high temperatures and processing materials, preventing malfunctions and obstructions while maintaining ease of operation through the external positioning of the motor.
Solution Approach 2:
A magnetic coupling or belt transmission serves as an intermediary that transmits rotational motion from the externally mounted motor to the workpiece carrier without direct mechanical connection. This intermediary protects the drive mechanism from temperature and material exposure while maintaining operational reliability.
4Reliability
If fixed transmission ratios are used in gear systems, then drive function is achieved, but workpiece holders rotate too rapidly
Solution Approach 1:
The patent replaces fixed gear transmission ratios with a variable speed control system using an external motor with adjustable speed control. This dynamic approach allows the rotation speed of workpiece holders to be precisely regulated according to processing requirements, preventing excessively rapid rotation while maintaining reliable drive transmission.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact, reliable, and adjustable workpiece carrier system that protects the drive mechanism from processing influences, allowing for precise control of workpiece rotation speeds and improved coating quality.
Implementation Method 1
using a planetary gear set to distribute torque evenly among workpiece holders
Implementation Method 2
featuring a closed rotary frame with an eccentric driving mechanism that protects the drive from environmental influences and allows adjustable angular velocity
Data Source
AI summary
A workpiece carrier (2) comprises a rotary frame (3) and a driving part (20), both of which are rotatable about a driving axle (4). The rotary frame (3) can be driven by a motor (6), and carries a plurality of workpiece holders (13) which are distributed around the driving axle (4) so as to be rotatable about holder axes. A driving disc (22) of the driving part (21) is in each case rotatable about an anchorage point (23) from which its centre point is at a distance of an eccentricity (E). A transmission part (25) having a coupling cutout which closely receives the driving disc (22) has driving apertures (26) through which there project driving pins (19) of the workpiece holders (13), which said driving pins (19) are likewise at a distance of the eccentricity (E) from the holder axes. The driving part (20) can be driven at a greater angular velocity by the rotation of the rotary frame (3), via an auxiliary gear set (31) attached to the base frame (1). The rotary frames of a plurality of workpiece carriers can be mounted on a base frame which is itself rotatable, and they can be rotated through engagement with a stationary toothed wheel.