Electron Cyclotron Resonance Source Impedance Matching
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Solution Overview
Problem
There is a need for efficiently and locally generating electron resonance in plasma, which existing technologies have not adequately addressed.
Innovation Solution
The electron resonance source apparatus and method utilize an electron cyclotron resonance source that receives a microwave from a co-axial cable, transforms the impedance, and generates a magnetic field to accelerate cyclotron resonant electrons, effectively generating electron resonance in plasma.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional plasma generation methods are used, then plasma can be generated, but electron resonance cannot be efficiently and locally generated
Solution Approach 1:
The patent applies local quality by creating a highly localized electron resonance region through the interaction of microwave radiation with a magnetic field in a specific spatial zone. The magnetic field is confined to a particular area, causing electrons only in that local region to resonate with the microwave frequency, thereby achieving efficient and localized plasma generation without requiring the entire system to be in resonance
2Productivity
If microwave power is increased to generate electron resonance, then resonance generation efficiency improves, but system complexity and energy loss increase
Solution Approach 1:
The patent utilizes parameter changes by adjusting the magnetic field strength to match the electron cyclotron frequency with the microwave frequency. By changing the magnetic field parameter, the system achieves resonance at a specific frequency, allowing efficient energy transfer from microwaves to electrons without requiring excessive power input, thus improving generation efficiency while minimizing energy loss
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient and localized generation of electron resonance in plasma, effectively addressing the existing technological challenges by providing a robust and efficient plasma generation system.
Implementation Method 1
accelerating cyclotron resonant electrons circulating about the magnet field with the microwave
Implementation Method 2
generating a magnetic field with a set of magnets
Implementation Method 3
passing the microwave through the first transform material with a second impedance
Data Source
AI summary
The invention comprises a method and apparatus for generating a plasma, comprising:(1) receiving a microwave from a co-axial cable, with a first impedance, into an electron cyclotron resonance source, the electron cyclotron resonance source comprising: a housing containing a first transform material and a transmission section; (2) passing the microwave through the first transform material with a second impedance; (3) coupling the microwave into the transmission section of the electron cyclotron resonance source, the transmission section comprising a third impedance, the transmission section comprising a first dielectric gap positioned between an inner conductor and an outer conductor; (4) generating a magnetic field with a set of magnets; and (5) accelerating cyclotron resonant electrons circulating about the magnet field with the microwave, such as where the first transform material has a thickness of one-quarter of a wavelength of the microwave.